Analysis and evaluation in the production process and equipment area of the Low-Cost Solar Array Project. Quarterly report, January-April 1979 Page: 52 of 179
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The cost decreases for the diffusion processes are about a
factor of four lower from current ones, and for the most part,
depend upon throughput increases.- The higher output rate
for Motorola's diffusion process, as compared to Spectrolab's,
is based on processing larger wafers (12-cm) at the same
rate as smaller ones (7.62-cm). The larger area (2.48x)
of the 12-cm diameter wafers accounts for the higher through-
put rates of Motorola's process. RCA proposes to automatically
transfer wafers from cassettes to furnace boats, and load/
unload the boats from the furnace, to increase output rates.
The loading and transferring machines add to the capital cost
of the RCA process, but increase output sufficiently to
lower unit area costs.
The RCA 2-sided implantation process, which is included
on Figure 4 with annealing, and the Lockheed implantation
proposal, should be ready for near-term production (1982-
1984). Both these machines have 10 mA ion beams. The RCA
implanter actually has two 10 mA beams but only one is used for
the front junction formation. This beam size is only twice
as large as some machines in operation and a 10 mA machine,
the NV-10, by Nova Associates, should be introduced into the
marketplace shortly.
The processing costs from employing the high current (100 mA)
machines by Motorola and Spire are the lowest ones listed
on Table III for junction formation. However, a longer time
than for the other options discussed above will be needed
before these machines are suitable for production use, because
of larger extrapolations of ion currents and throughput
rates. In .addition, the Morotola 100 mA proposal has reductions
44
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Goldman, H. & Wolf, M. Analysis and evaluation in the production process and equipment area of the Low-Cost Solar Array Project. Quarterly report, January-April 1979, report, June 1, 1979; United States. (https://digital.library.unt.edu/ark:/67531/metadc1092164/m1/52/: accessed April 25, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.