Establishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Low Cost Silicon Solar Array Project, Task I. Quarterly progress report, April--June 1977

PDF Version Also Available for Download.

Description

The purpose of this program is to establish the practicality of a process for the high volume, low cost production of silane and its subsequent pyrolysis into a semi-conductive grade silicon metal. A small process develop unit for producing silane from dichlorosilane (DCS) using a tertiary amine functional ion exchange resin as a catalyst for a redistribution reaction has been operated successfully on what is now a routine basis. High quality silane has been produced in good yield and limiting equipment size has been identified. The silane gas product is essentially free of foreign compounds (to 5 ppM detection limit) ... continued below

Physical Description

Pages: 49

Creation Information

Breneman, W.C.; Farrier, E.G.; Mui, J.Y.P. & Rexer, J. October 1, 1977.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

The purpose of this program is to establish the practicality of a process for the high volume, low cost production of silane and its subsequent pyrolysis into a semi-conductive grade silicon metal. A small process develop unit for producing silane from dichlorosilane (DCS) using a tertiary amine functional ion exchange resin as a catalyst for a redistribution reaction has been operated successfully on what is now a routine basis. High quality silane has been produced in good yield and limiting equipment size has been identified. The silane gas product is essentially free of foreign compounds (to 5 ppM detection limit) and produces a silicon epitaxial film with a resistivity of 20 ohm cm and very strong ''N'' type character. Epi film quality was very good. The overall yield of silane was 92% of theory. The production rate, limited by the 2.66 cm diameter distillation column, was 112 g/hr. Design of a silicon tetrachloride (STC) hydrogenation reactor used to convert co-product STC to trichlorosilane has been completed and fabrication and installation are underway, as is a modification of the silane unit to permit use of trichlorosilane as feed, producing STC and silane. The production of silicon by the pyrolysis of silane is currently being accomplished in a free space reactor. The free space reactor product is a very fine powder which is then consolidated by melting. The melt is cast into rods. Analysis of the product from earlier experiments indicated that metal or graphite liners in the reaction chamber region resulted in product contamination. A quartz liner is currently being evaluated in the reaction chamber. Other identified contamination sources are air borne particles and contamination during melting and/or casting.

Physical Description

Pages: 49

Notes

Dep. NTIS, PC A03/MF A01.

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Report No.: ERDA/JPL/954334-77/3
  • Grant Number: NAS-7-100-954334
  • DOI: 10.2172/5385536 | External Link
  • Office of Scientific & Technical Information Report Number: 5385536
  • Archival Resource Key: ark:/67531/metadc1071008

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • October 1, 1977

Added to The UNT Digital Library

  • Feb. 4, 2018, 10:51 a.m.

Description Last Updated

  • March 28, 2018, 1:17 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 2

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Breneman, W.C.; Farrier, E.G.; Mui, J.Y.P. & Rexer, J. Establishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Low Cost Silicon Solar Array Project, Task I. Quarterly progress report, April--June 1977, report, October 1, 1977; United States. (digital.library.unt.edu/ark:/67531/metadc1071008/: accessed September 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.