X-ray zone plates fabricated using electron-beam and x-ray lithography

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Fresnel zone plate patterns, free of spherical abberation, with diameters of up to 0.63 mm and linewidths as small as 1000 A were fabricated on polyimide-membrane x-ray masks using scanning electron beam lithography Distortion of the electron beam scan raster was reduced to < 2500 A over a 2 mm x 2 mm field by applying deflection corrections, while viewing the distortion using a moire method. C/sub k/ x-ray lithography was used to replicate the zone plate pattern in thick PMMA over a 100 A thick plating base on a glass substrate. Zones plates in 1.3 ..mu..m thick gold were ... continued below

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Pages: 19

Creation Information

Shaver, D.C.; Flanders, D.C.; Ceglio, N.M. & Smith, H.I. May 1979.

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Description

Fresnel zone plate patterns, free of spherical abberation, with diameters of up to 0.63 mm and linewidths as small as 1000 A were fabricated on polyimide-membrane x-ray masks using scanning electron beam lithography Distortion of the electron beam scan raster was reduced to < 2500 A over a 2 mm x 2 mm field by applying deflection corrections, while viewing the distortion using a moire method. C/sub k/ x-ray lithography was used to replicate the zone plate pattern in thick PMMA over a 100 A thick plating base on a glass substrate. Zones plates in 1.3 ..mu..m thick gold were fabricated by plating, and made free-standing by removal of the plating base and the supporting glass substrate. Zone plates were tested as imaging elements with visible light and soft x-rays.

Physical Description

Pages: 19

Notes

Dep. NTIS, PC A02/MF A01.

Source

  • 15. symposium on electron, ion and photon beam technology, Boston, MA, USA, May 1979

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  • Report No.: UCRL-84043
  • Report No.: CONF-7905140-1
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 5412333
  • Archival Resource Key: ark:/67531/metadc1065338

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • May 1979

Added to The UNT Digital Library

  • Feb. 4, 2018, 10:51 a.m.

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  • March 27, 2018, 6:30 p.m.

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Shaver, D.C.; Flanders, D.C.; Ceglio, N.M. & Smith, H.I. X-ray zone plates fabricated using electron-beam and x-ray lithography, article, May 1979; United States. (digital.library.unt.edu/ark:/67531/metadc1065338/: accessed December 10, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.