Low temperature CVD of TaB/sub 2/

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Crystalline TaB/sub 2/ has been deposited using the CVD reaction of TaCl/sub 5/ and B/sub 2/H/sub 6/ in the temperature range of 773-1200/sup 0/K. Thermodynamic calculations have been made which compare the use of both B/sub 2/H/sub 6/ and BCl/sub 3/ as B source gases. The deposits obtained with B/sub 2/H/sub 6/ exhibited extremely small crystal size and contained amorphous B when the deposition temperature was below approx. 873/sup 0/K but were substoichiometric in B above this temperature. Carbon analysis indicated that C may substitute for B and thereby stabilize the diboride structure at high deposition temperatures. Microhardness of the ... continued below

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Pages: 20

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Randich, E. January 1, 1980.

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Description

Crystalline TaB/sub 2/ has been deposited using the CVD reaction of TaCl/sub 5/ and B/sub 2/H/sub 6/ in the temperature range of 773-1200/sup 0/K. Thermodynamic calculations have been made which compare the use of both B/sub 2/H/sub 6/ and BCl/sub 3/ as B source gases. The deposits obtained with B/sub 2/H/sub 6/ exhibited extremely small crystal size and contained amorphous B when the deposition temperature was below approx. 873/sup 0/K but were substoichiometric in B above this temperature. Carbon analysis indicated that C may substitute for B and thereby stabilize the diboride structure at high deposition temperatures. Microhardness of the coatings decreased with increasing B/Ta ratio and decreasing crystal size.

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Pages: 20

Notes

Dep. NTIS, PC A02/MF A01.

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  • International conference on metallurgical coatings, San Diego, CA, USA, 21 Apr 1980

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  • Report No.: SAND-79-2167C
  • Report No.: CONF-800439-1
  • Grant Number: EY-76-C-04-0789
  • Office of Scientific & Technical Information Report Number: 5441513
  • Archival Resource Key: ark:/67531/metadc1065133

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • January 1, 1980

Added to The UNT Digital Library

  • Feb. 4, 2018, 10:51 a.m.

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  • March 27, 2018, 7:07 p.m.

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Randich, E. Low temperature CVD of TaB/sub 2/, article, January 1, 1980; United States. (digital.library.unt.edu/ark:/67531/metadc1065133/: accessed November 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.