Textures and morphologies of chemical vapor deposited (CVD) diamond

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The textures, surface morphologies, structural perfection, and properties of diamond films grown by activated chemical vapor deposition (CVD) vary greatly with the growth conditions. The evolution of two commonly observed polycrystalline morphologies, which give rise to <110> textures, will be described as well as the development of four films grown to produce <100>, <111>, and near <100>'' textures with various combinations of growth facets. These films were grown to test models of texture development. Films free of twins, microtwins, and stacking faults are deposited when only (100) facets are permitted to grow. In polycrystalline materials, special conditions must be met ... continued below

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Pages: (20 p)

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Clausing, R.E.; Heatherly, L.; Horton, L.L.; Specht, E.D.; Begun, G.M. (Oak Ridge National Lab., TN (United States)) & Wang, Z.L. (Tennessee Univ., Knoxville, TN (United States)) January 1, 1991.

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Description

The textures, surface morphologies, structural perfection, and properties of diamond films grown by activated chemical vapor deposition (CVD) vary greatly with the growth conditions. The evolution of two commonly observed polycrystalline morphologies, which give rise to <110> textures, will be described as well as the development of four films grown to produce <100>, <111>, and near <100>'' textures with various combinations of growth facets. These films were grown to test models of texture development. Films free of twins, microtwins, and stacking faults are deposited when only (100) facets are permitted to grow. In polycrystalline materials, special conditions must be met to avoid the formation of planar defects at the peripheries of individual crystallites. The planar defects grow from (111) or mixed microfaceted surfaces. Twinning plays an important role in growth of (111) faceted surfaces. The films have been characterized with Raman spectroscopy, x-ray diffraction, transmission electron microscopy (TEM), scanning electron microscopy (SEM), and optical methods. 13 refs., 7 figs.

Physical Description

Pages: (20 p)

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OSTI; NTIS; GPO Dep.

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  • 2. European conference on diamond, diamond-like and related coatings, Nice (France), 2-6 Sep 1991

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  • Other: DE92001969
  • Report No.: CONF-9109104-1
  • Grant Number: AC05-84OR21400
  • Office of Scientific & Technical Information Report Number: 5056205
  • Archival Resource Key: ark:/67531/metadc1060189

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  • January 1, 1991

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  • Jan. 22, 2018, 7:23 a.m.

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  • Feb. 1, 2018, 6:20 p.m.

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Clausing, R.E.; Heatherly, L.; Horton, L.L.; Specht, E.D.; Begun, G.M. (Oak Ridge National Lab., TN (United States)) & Wang, Z.L. (Tennessee Univ., Knoxville, TN (United States)). Textures and morphologies of chemical vapor deposited (CVD) diamond, article, January 1, 1991; Tennessee. (digital.library.unt.edu/ark:/67531/metadc1060189/: accessed August 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.