Optical diagnostics for a high power, rf-inductively coupled plasma Metadata

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  • Main Title Optical diagnostics for a high power, rf-inductively coupled plasma


  • Author: Nogar, N.S.
    Creator Type: Personal
  • Author: Keaton, G.L.
    Creator Type: Personal
  • Author: Anderson, J.E.
    Creator Type: Personal
  • Author: Trkula, M.
    Creator Type: Personal


  • Name: Los Alamos National Laboratory
    Place of Publication: New Mexico


  • Creation: 1988-01-01


  • English


  • Content Description: Emission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design inductively coupled plasma. This plasma is used for a variety of syntheses including SiC, TiC, BN, A1N and diamond. Temporally- and spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.
  • Physical Description: Pages: 7


  • Keyword: Rare Gases
  • Keyword: Elements
  • Keyword: Plasma Diagnostics
  • Keyword: Laser Spectroscopy
  • Keyword: Emission Spectroscopy
  • STI Subject Categories: 37 Inorganic, Organic, Physical And Analytical Chemistry
  • STI Subject Categories: 75 Condensed Matter Physics, Superconductivity And Superfluidity
  • Keyword: Fluids
  • Keyword: Gases
  • Keyword: Fluorescence Spectroscopy
  • Keyword: Nonmetals
  • Keyword: Argon
  • Keyword: Spectroscopy 640410* -- Fluid Physics-- General Fluid Dynamics
  • STI Subject Categories: 400201 -- Chemical & Physicochemical Properties
  • Keyword: Synthesis


  • Conference: Spring meeting of the Materials Research Society, Reno, NV, USA, 4 Apr 1988


  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI


  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article


  • Text


  • Other: DE88007822
  • Report No.: LA-UR-88-1025
  • Report No.: CONF-880408-7
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 5188445
  • Archival Resource Key: ark:/67531/metadc1057153