Optical diagnostics for a high power, rf-inductively coupled plasma Page: 4 of 8
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TP ........ DL .. PL
E L A F
V ( I ---
G SPT A/D
Figure 1. Scherr.tic of the experimental apParatus. SPT is the
shielded plasma tube, G is the gas inlet, E : V are th-
exhaust and vacuum outlets, respectively; PL .s the pump
(Nd+3:YAG) laser, DL is the dye laser, and TP the turning
prism; L is the collection lens, A an aperture, F a fiber
optic, M a 1 meter monochromator, P a photomultiplier tube or
photodiode array and V is a high voltage source; A/D is an
analog to digital converter, SP is signal processing
electronics, and C is an Apple Macintosh PlusTM computer.
RE S'JLT S
Internal Energy Measurements.
Internal energy distributions were determined by vari us :nethdr
for Moth pure Ar and mixed gas tail flames. For pure argon
measurements, the temperature was normally determined from
emiss on intensities from selected, well-characterized, energy
levels. Representative temperatures, as determined by fittink-1 to
a Boltzmann distribution, are displayed in Table I. It she uld 10,
pointed out that although the electronic distr:nation is not Wr"1-
represented by a single temperature, in many ca,;es the rulat iv-
populations within a single manifold were approximately
statistical in nature. The wide diversity -f results su115.t n
that the system is not well-dnscribed by a t emperature, eve: ii a
vt ry l crca l i zed regi ons, and that a local thormn-lynam i c equ l ii'r ;11:'
viewl- iit it inapprnpr int.e. Fu.t her , the par t icular distri but i: n
of iit erri.,I ener qies seems highly dependent ~ he mechanism L
fcr rnat i'1.
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Nogar, N.S.; Keaton, G.L.; Anderson, J.E. & Trkula, M. Optical diagnostics for a high power, rf-inductively coupled plasma, article, January 1, 1988; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc1057153/m1/4/: accessed March 22, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.