Development of a new generation of optical slope measuring profiler

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A collaboration, including all DOE synchrotron labs, industrial vendors of x-ray optics, and with active participation of the HBZ-BESSY-II optics group has been established to work together on a new slope measuring profiler -- the optical slope measuring system (OSMS). The slope measurement accuracy of the instrument is expected to be<50 nrad for the current and future metrology of x-ray optics for the next generation of light sources. The goals were to solidify a design that meets the needs of mirror specifications and also be affordable; and to create a common specification for fabrication of a multi-functional translation/scanning (MFTS) system ... continued below

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Yashchuk, Valeriy V.; Takacs, Peter Z.; McKinney, Wayne R.; Assoufid, Lahsen; Siewert, Frank & Zeschke, Thomas September 16, 2010.

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A collaboration, including all DOE synchrotron labs, industrial vendors of x-ray optics, and with active participation of the HBZ-BESSY-II optics group has been established to work together on a new slope measuring profiler -- the optical slope measuring system (OSMS). The slope measurement accuracy of the instrument is expected to be<50 nrad for the current and future metrology of x-ray optics for the next generation of light sources. The goals were to solidify a design that meets the needs of mirror specifications and also be affordable; and to create a common specification for fabrication of a multi-functional translation/scanning (MFTS) system for the OSMS. This was accomplished by two collaborative meetings at the ALS (March 26, 2010) and at the APS (May 6, 2010).

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  • Journal Name: Nuclear Instruments and Methods in Physics Research Section A

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  • Report No.: LBNL-3975E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 991742
  • Archival Resource Key: ark:/67531/metadc1013927

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  • September 16, 2010

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  • Oct. 14, 2017, 8:36 a.m.

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  • Oct. 17, 2017, 8:10 p.m.

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Yashchuk, Valeriy V.; Takacs, Peter Z.; McKinney, Wayne R.; Assoufid, Lahsen; Siewert, Frank & Zeschke, Thomas. Development of a new generation of optical slope measuring profiler, article, September 16, 2010; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc1013927/: accessed October 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.