Atomic Layer Deposition for SRF Cavities

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We have begun using Atomic Layer Deposition (ALD) to synthesize a variety of surface coatings on coupons and cavities as part of an effort to produce rf structures with significantly better performance and yield than those obtained from bulk niobium, The ALD process offers the possibility of conformally coating complex cavity shapes with precise layered structures with tightly constrained morphology and chemical properties. Our program looks both at the metallurgy and superconducting properties of these coatings, and also their performance in working structures. Initial results include: (1) results from ALD coated cavities and coupons, (2) new evidence from point contact ... continued below

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3 pages

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Proslier, Th.; Ha, Y.; Zasadzinski, J.; /IIT, Chicago; Ciovati, G.; Kneissel, P. et al. May 1, 2009.

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Description

We have begun using Atomic Layer Deposition (ALD) to synthesize a variety of surface coatings on coupons and cavities as part of an effort to produce rf structures with significantly better performance and yield than those obtained from bulk niobium, The ALD process offers the possibility of conformally coating complex cavity shapes with precise layered structures with tightly constrained morphology and chemical properties. Our program looks both at the metallurgy and superconducting properties of these coatings, and also their performance in working structures. Initial results include: (1) results from ALD coated cavities and coupons, (2) new evidence from point contact tunneling (PCT) showing magnetic oxides can be a significant limitation to high gradient operation, (3) a study of high pressure rinsing damage on niobium samples.

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3 pages

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  • Presented at Particle Accelerator Conference (PAC 09), Vancouver, BC, Canada, 4-8 May 2009

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  • Report No.: FERMILAB-PUB-09-714-TD
  • Grant Number: AC02-07CH11359
  • Office of Scientific & Technical Information Report Number: 988449
  • Archival Resource Key: ark:/67531/metadc1013409

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  • May 1, 2009

Added to The UNT Digital Library

  • Oct. 14, 2017, 8:36 a.m.

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  • Oct. 20, 2017, 1:02 p.m.

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Proslier, Th.; Ha, Y.; Zasadzinski, J.; /IIT, Chicago; Ciovati, G.; Kneissel, P. et al. Atomic Layer Deposition for SRF Cavities, article, May 1, 2009; Batavia, Illinois. (digital.library.unt.edu/ark:/67531/metadc1013409/: accessed October 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.