Optical far- and near-field femtosecond laser ablation of Si for nanoscale chemical analysis

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Extending spatial resolution in laser-based chemical analysis to the nanoscale becomes increasingly important as nanoscience and nanotechnology develop. Implementation of femtosecond laser pulses arises as a basic strategy for increasing resolution since it is associated with spatially localized material damage. In this work we study femtosecond laser far- and near-field processing of silicon (Si) at two distinct wavelengths (400 and 800 nm), for nanoscale chemical analysis. By tightly focusing femtosecond laser beams in the far-field we were able to produce sub-micrometer craters. In order to further reduce the crater size, similar experiments were performed in the near-field through sub-wavelength apertures, ... continued below

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Zormpa, Vasileia; Mao, Xianglei & Russo, Richard E. February 2, 2010.

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Extending spatial resolution in laser-based chemical analysis to the nanoscale becomes increasingly important as nanoscience and nanotechnology develop. Implementation of femtosecond laser pulses arises as a basic strategy for increasing resolution since it is associated with spatially localized material damage. In this work we study femtosecond laser far- and near-field processing of silicon (Si) at two distinct wavelengths (400 and 800 nm), for nanoscale chemical analysis. By tightly focusing femtosecond laser beams in the far-field we were able to produce sub-micrometer craters. In order to further reduce the crater size, similar experiments were performed in the near-field through sub-wavelength apertures, resulting to the formation of sub-30 nm craters. Laser Induced Breakdown Spectroscopy (LIBS) was used for chemical analysis with a goal to identify the minimum crater size from which spectral emission could be measured. Emission from sub-micrometer craters (full-with-at-half-maximum) was possible, which are among the smallest ever reported for femtosecond LIBS.

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  • Journal Name: Analytical and Bioanalytical Chemistry

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  • Report No.: LBNL-3585E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 984741
  • Archival Resource Key: ark:/67531/metadc1013242

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • February 2, 2010

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  • Oct. 14, 2017, 8:36 a.m.

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  • Oct. 17, 2017, 6:24 p.m.

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Zormpa, Vasileia; Mao, Xianglei & Russo, Richard E. Optical far- and near-field femtosecond laser ablation of Si for nanoscale chemical analysis, article, February 2, 2010; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc1013242/: accessed December 11, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.