Mask roughness induced LER: a rule of thumb -- paper

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Much work has already been done on how both the resist and line-edge roughness (LER) on the mask affect the final printed LER. What is poorly understood, however, is the extent to which system-level effects such as mask surface roughness, illumination conditions, and defocus couple to speckle at the image plane, and currently factor into LER limits. Here, we propose a 'rule-of-thumb' simplified solution that provides a fast and powerful method to obtain mask roughness induced LER. We present modeling data on an older generation mask with a roughness of 230 pm as well as the ultimate target roughness of ... continued below

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McClinton, Brittany & Naulleau, Patrick March 12, 2010.

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Much work has already been done on how both the resist and line-edge roughness (LER) on the mask affect the final printed LER. What is poorly understood, however, is the extent to which system-level effects such as mask surface roughness, illumination conditions, and defocus couple to speckle at the image plane, and currently factor into LER limits. Here, we propose a 'rule-of-thumb' simplified solution that provides a fast and powerful method to obtain mask roughness induced LER. We present modeling data on an older generation mask with a roughness of 230 pm as well as the ultimate target roughness of 50 pm. Moreover, we consider feature sizes of 50 nm and 22 nm, and show that as a function of correlation length, the LER peaks at the condition that the correlation length is approximately equal to the resolution of the imaging optic.

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  • SPIE advanced lithography , San Jose, CA, February 22-25, 2010

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  • Report No.: LBNL-3309E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 983175
  • Archival Resource Key: ark:/67531/metadc1013103

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  • March 12, 2010

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  • Oct. 14, 2017, 8:36 a.m.

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  • Oct. 18, 2017, 10:32 a.m.

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McClinton, Brittany & Naulleau, Patrick. Mask roughness induced LER: a rule of thumb -- paper, article, March 12, 2010; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc1013103/: accessed June 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.