High-efficiency 5000 lines/mm multilayer-coated blazed grating for EUV wavelengths

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Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property however depends critically on the ability to create a structure with near atomic perfection. In this work we report on a method to produce these structures. We report measurements that show, for a 5000 l/mm grating diffracting in the 3rd order, a diffraction efficiency of 37.6percent at a wavelength of 13.6 nm, close to the theoretical maximum. This work now shows a ... continued below

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Voronov, Dmitriy; Ahn, Minseung; Anderson, Erik; Cambie, Rossana; Chang, Chih-Hao; Gullikson, Eric et al. April 19, 2010.

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Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property however depends critically on the ability to create a structure with near atomic perfection. In this work we report on a method to produce these structures. We report measurements that show, for a 5000 l/mm grating diffracting in the 3rd order, a diffraction efficiency of 37.6percent at a wavelength of 13.6 nm, close to the theoretical maximum. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.

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2615

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  • Journal Name: Optics Letters; Journal Volume: 35; Journal Issue: 15

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  • Report No.: LBNL-3366E
  • Grant Number: DE-AC02-05CH11231
  • DOI: 10.1364/OL.35.002615 | External Link
  • Office of Scientific & Technical Information Report Number: 983218
  • Archival Resource Key: ark:/67531/metadc1012136

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Office of Scientific & Technical Information Technical Reports

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  • April 19, 2010

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  • Oct. 14, 2017, 8:36 a.m.

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  • Oct. 17, 2017, 6:14 p.m.

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Voronov, Dmitriy; Ahn, Minseung; Anderson, Erik; Cambie, Rossana; Chang, Chih-Hao; Gullikson, Eric et al. High-efficiency 5000 lines/mm multilayer-coated blazed grating for EUV wavelengths, article, April 19, 2010; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc1012136/: accessed December 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.