Characterization of electron microscopes with binary pseudo-random multilayer test samples

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We discuss the results of SEM and TEM measurements with the BPRML test samples fabricated from a BPRML (WSi2/Si with fundamental layer thickness of 3 nm) with a Dual Beam FIB (focused ion beam)/SEM technique. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize x-ray ... continued below

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Yashchuk, Valeriy V; Conley, Raymond; Anderson, Erik H.; Barber, Samuel K.; Bouet, Nathalie; McKinney, Wayne R. et al. July 9, 2010.

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We discuss the results of SEM and TEM measurements with the BPRML test samples fabricated from a BPRML (WSi2/Si with fundamental layer thickness of 3 nm) with a Dual Beam FIB (focused ion beam)/SEM technique. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize x-ray microscopes. Corresponding work with x-ray microscopes is in progress.

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  • The 16th Pan-American Synchrotron Radiation Instrumentation Conference, Chicago, IL, September 21-24, 2010

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  • Report No.: LBNL-3839E-Ext-Abs
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 986498
  • Archival Resource Key: ark:/67531/metadc1012120

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  • July 9, 2010

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  • Oct. 14, 2017, 8:36 a.m.

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  • Oct. 17, 2017, 6:03 p.m.

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Yashchuk, Valeriy V; Conley, Raymond; Anderson, Erik H.; Barber, Samuel K.; Bouet, Nathalie; McKinney, Wayne R. et al. Characterization of electron microscopes with binary pseudo-random multilayer test samples, article, July 9, 2010; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc1012120/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.