Cathode Sputtering Problems
Description:
The question of the nature and charge of the metallic particles emitted in cathode sputtering has been answered experimentally: the particles are primarily neutral atoms. The proof was obtained from the moving particles themselves by a new "spectroscopic method of vapor pressure measurement" in combination with a "vapor pressure measurement from coating density."
Date:
unknown
Creator:
Von Hippel, Arthur R. |(Arthur Robert), 1898-2003.
Item Type:
Refine your search to only
Report
Partner:
UNT Libraries Government Documents Department