Characterization of Boron Nitride Thin Films on Silicon (100) Wafer.
Description:
Cubic boron nitride (cBN) thin films offer attractive mechanical and electrical properties. The synthesis of cBN films have been deposited using both physical and chemical vapor deposition methods, which generate internal residual, stresses that result in delamination of the film from substrates. Boron nitride films were deposited using electron beam evaporation without bias voltage and nitrogen bombardment (to reduce stresses) were characterize using FTIR, XRD, SEM, EDS, TEM, and AFM technique…
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Date:
August 2007
Creator:
Maranon, Walter
Partner:
UNT Libraries