Material removal and surface figure during pad polishing of fused silica
Description:
The material removal and surface figure after ceria pad polishing of fused silica glass have been measured and analyzed as a function of kinematics, loading conditions, and polishing time. Also, the friction at the workpiece/lap interface, the slope of the workpiece relative to the lap plane, and lap viscoelastic properties have been measured and correlated to material removal. The results show that the relative velocity between the workpiece & lap (determined by the kinematics) and the pressur…
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Date:
May 4, 2009
Creator:
Suratwala, T I; Feit, M D & Steele, W A
Item Type:
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UNT Libraries Government Documents Department