Experimental and Analytical Study of the Sputtering Phenomena
Description:
An experimental apparatus was constructed to examine the heat-transfer characteristics of a sputtering front. In the present study, a heat source of sufficient intensity was located immediately below the sputtering front, which prevented its downward progress, thus permitting detailed measurements of steady-state surface temperatures throughout a sputtering front. A two-dimensional analytical model was developed to describe a stationary sputtering front where the wet-dry interface corresponds t…
more
Date:
March 1976
Creator:
Howard, Paul A.
Item Type:
Refine your search to only
Report