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  Partner: UNT College of Arts and Sciences
 Decade: 1980-1989
 Year: 1982
 Month: November
 Collection: UNT Scholarly Works
Rapid isothermal anneal of 75As implanted silicon

Rapid isothermal anneal of 75As implanted silicon

Date: November 15, 1982
Creator: Wilson, Scott R.; Gregory, R. B.; Paulson, W. M.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
Description: Article discussing a study of the rapid isothermal anneal of 75As implanted silicon.
Contributing Partner: UNT College of Arts and Sciences