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  Partner: UNT College of Arts and Sciences
 Department: Physics
Low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry

Low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry

Date: June 8, 1998
Creator: McDaniel, Floyd Del; Datar, Sameer A.; Guo, Baonian N.; Renfrow, Steve N.; Anthony, J. M. & Zhao, Z. Y.
Description: This article discusses low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry. Accelerator mass spectrometry (AMS) is now widely used in over 30 laboratories throughout the world to measure ratios of the abundances of long-lived radioisotopes such as ¹⁰Be, ¹⁴C, ³⁶Cl, and ¹²⁷I to their stable isotopes at levels as low as 10(-16). Trace-element AMS (TEAMS) is an application of AMS to the measurement of very low levels of stable isotope impurities. Copper concentrations as low as 1 part per billion have been measured in silicon wafers. In this letter, the authors demonstrate the use of TEAMS to measure previously unknown copper concentration depth profiles in As-implanted Si wafers at a few parts per billion. To verify the TEAMS technique, the samples from the same wafer were measured with secondary ion mass spectrometry, which showed the same profiles, albeit plateauing out at a concentration level six times higher than the TEAMS measurement. The ability to measure at these levels is especially significant in light of the recent moves towards the use of copper interconnects in place of aluminum in integrated circuits.
Contributing Partner: UNT College of Arts and Sciences
M-shell x-ray production cross sections for 0.5-2.5-MeV Be+ ions incident upon selected elements from praseodymium to bismuth

M-shell x-ray production cross sections for 0.5-2.5-MeV Be+ ions incident upon selected elements from praseodymium to bismuth

Date: January 15, 1988
Creator: Price, J. L.; Duggan, Jerome L.; McDaniel, Floyd Del; Lapicki, G. & Mehta, R.
Description: This article discusses M-shell x-ray production cross sections for 0.5-2.5-MeV Be+ ions incident upon selected elements from praseodymium to bismuth. M-shell x-ray production cross sections are reported for ₄⁹Be+ ions incident upon thin ₅₉Pr, ₆₀Nd, ₆₃Eu, ₆₆Dy, ₆₇Ho, ₇₂Hf, ₇₄W, ₇₉Au, ₈₂Pb, and ₈₃Bi targets. Incident-beam energies range from 0.5 to 2.5 MeV (55.6-267 keV/u). The results are compared to the predictions of the first-Born-approximation theory and the perturbed-stationary-state theory with energy-loss, Coulomb-deflection, and relativistic corrections (ECPSSR). The first-Born-approximation theory overpredicts the measured cross sections everywhere, especially at high energies, while the ECPSSR theory tends to underpredict them, especially at low energy. This discrepancy between the measurements and the ECPSSR theory may be due in part to multiple-ionization effects which could change the fluorescence yields from the single-hole values used to convert total ionization to x-ray production cross sections in the theoretical calculations.
Contributing Partner: UNT College of Arts and Sciences
Simultaneous measurement of the average ion-induced electron emission yield and the mean charge for isotachic ions in carbon foils

Simultaneous measurement of the average ion-induced electron emission yield and the mean charge for isotachic ions in carbon foils

Date: February 1997
Creator: Arrale, A.M.; Zhao, Z.Y.; Kirchhoff, J.F.; Weathers, Duncan L.; McDaniel, Floyd Del & Matteson, Samuel E.
Description: This article discusses simultaneous measurement of the average ion-induced electron emission yield and the mean charge for isotachic ions in carbon foils. Knowledge of the incident ion's atomic number (Z₁) dependence of ion-induced electron emission yields can be the basis for a general understanding of ion-atom interaction phenomena and, in particular, for the design of Z₁-sensitive detectors that could be useful, for example, in the separation of isobars in accelerator mass spectrometry. The Z₁ dependence of ion-induced electron emission yields, y, has been investigating using heavy ions C³⁺, O³⁺, F³⁺, Na³⁺, Al³⁺, Si³⁺, P³⁺, S³⁺, Cl³⁺, K³⁺, Ti³⁺, Cr³⁺, Mn⁴⁺, Fe⁴⁺, Co⁴⁺, Ni⁴⁺, Cu⁴⁺, Ga⁴⁺, As⁵⁺, Br⁵⁺, Ru⁷⁺, Ag⁷⁺, Sn⁷⁺, and I⁸⁺ of identical velocity (v = 2v₀, where v₀ is the Bohr velocity) normally incident on 50 μg/cm² sputter-cleaned carbon foils. Measured yields as a function of Z₁ reveal an oscillatory behavior with pronounced maxima and minima. Contrary to previously reported yields that assumed to monotonically increasing empirical mean charge state for the exiting ion, the present work indicates the Z₁ oscillations in the experimentally measured yields, a fact masked in previous work. The strong Z₁ oscillations can only be observed by simultaneous measurement of the yield and the ...
Contributing Partner: UNT College of Arts and Sciences
Nuclear lifetime of states in ⁹⁴Tc and ⁹⁶Tc via the pulsed-beam, direct-timing technique

Nuclear lifetime of states in ⁹⁴Tc and ⁹⁶Tc via the pulsed-beam, direct-timing technique

Date: September 1974
Creator: McDaniel, Floyd Del & Snyder, F.D.
Description: This article discusses nuclear lifetime of states in ⁹⁴TC and ⁹⁶TC via the pulsed-beam, direct-timing technique. The mean lifetimes of the 333 keV level in ⁹⁴TC and the 119 and 315 keV levels in ⁹⁶TC were measured by the pulsed-beam, direct-timing technique. The values obtained for the mean lifetimes are: τ(333 keV)=2.2(-0.3)(+0.5) nsec, τ(119 keV)=37.0(-0.3)(+0.6) nsec, and τ(315 keV)=2.9(-0.2)(+0.5) nsec. The transition strengths are in agreement with those for other transitions in this mass region.
Contributing Partner: UNT College of Arts and Sciences
Elastic and inelastic scattering of 1.5-MeV neutrons by the even-A isotopes of zirconium and molybdenum

Elastic and inelastic scattering of 1.5-MeV neutrons by the even-A isotopes of zirconium and molybdenum

Date: September 1974
Creator: McDaniel, Floyd Del. (Floyd Delbert), 1942-; Brandenberger, J. D.; Leighton, H. G. & Glasgow, G. P.
Description: This article discusses elastic and inelastic scattering of 1.5-MeV neutrons by the even-A isotopes of zirconium and molybdenum. Abstract: Differential elastic and inelastic cross sections were measured for 1.5-MeV neutrons scattered by the even-A isotopes of zirconium and molybdenum. The scattering samples were enriched isotopes of ⁹⁰Zr, ⁹²Zr, ⁹⁴Zr, ⁹²Mo, ⁹⁴Mo, ⁹⁶Mo, and ¹⁰⁰Mo. The cross sections were measured using a dynamically biased neutron time-of-flight spectrometer. The differential cross sections have root-mean-square relative and normalization uncertainties of 2 to 3.5% and 7 to 7.5%, respectively, for elastic scattering, and 6 to 13% and 9 to 15%, respectively, for inelastic scattering. Isotopes with similar level structures have almost identical elastic angular distributions. The entire set of data was theoretically fitted using the optical-statistical model with resonance-width-fluctuation corrections. The calculated elastic differential cross section was assumed to be an incoherent sum of shape-elastic and compound-elastic scattering. At the minima in the angular distributions the cross sections were dominated by compound-elastic scattering.
Contributing Partner: UNT College of Arts and Sciences
Fabrication of silicon-based optical components for an ultraclean accelerator mass spectronomy negative ion source

Fabrication of silicon-based optical components for an ultraclean accelerator mass spectronomy negative ion source

Date: May 1994
Creator: Kirchhoff, J. F.; Marble, D. K.; Weathers, Duncan L.; McDaniel, Floyd Del. (Floyd Delbert), 1942-; Matteson, Samuel E.; Anthony, J. M. et al
Description: This article discusses fabrication of silicon-based optical components for an ultraclean accelerator mass spectronomy negative ion source. Abstract: An ultraclean accelerator mass spectronomy negative ion source for semiconductor material mass analysis has been built and is in operation at the University of North Texas' Ion Beam Modification and Analysis Laboratory (IBMAL). The source is unique in that the active surfaces and apertures of the optical components in the ion source have been fabricated from high-purity single crystal silicon. This prevents both the 133Cs+ beam incident on the semiconductor samples and the negative ions from the sample surfaces from "seeing" and sputtering any metal surfaces (mostly stainless steel) in the beamline. The Cs+ beam can be rastered across the sample surface and the impact energy is adjustable to control depth-profiling rates. An ultraclean ion source of this type is necessary to prevent the injection of Fe and other beamline elements onto the sample or into the tandem accelerator, which is equivalent to putting an impurity signal into the mass analysis of the semiconductor sample. Suppression of these elements increases the sensitivity of the analysis to one part in 10¹² for many masses. The fabrication and alignment of the optical components-einzel lenses, ...
Contributing Partner: UNT College of Arts and Sciences
Fast diffusion of As in polycrystalline silicon during rapid thermal annealing

Fast diffusion of As in polycrystalline silicon during rapid thermal annealing

Date: August 15, 1984
Creator: Wilson, S. R.; Paulson, W. M.; Gregory, R.B.; Gressett, J. D.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
Description: This article discusses fast diffusion of As in polycrystalline silicon during rapid thermal annealing. Abstract: The diffusion of As in polycrystalline silicon films subjected to rapid thermal annealing has been studied using sheet resistance and Rutherford backscattering. The polycrystalline Si films were deposited on oxidized silicon wafers, implanted with As, and annealed with a Varian IA-200 isothermal annealer. Infrared radiation from a resistively heated sheet of graphite heats the wafer, in a vacuum, to temperatures > 1000 °C for times on the order of a few seconds. The rate of diffusion and rate of loss of As from the polycrystalline Si is much faster than the diffusion rate and loss rate in single crystal Si annealed with identical conditions. Diffusion prior to grain growth agrees with previously reported results for As in polycrystalline Si. However, grain growth appears to enhance As diffusion.
Contributing Partner: UNT College of Arts and Sciences
High sensitivity measurement of implanted As in the presence of Ge in Ge(x)Si(1-x)/Si layered alloys using trace element accelerator mass spectrometry

High sensitivity measurement of implanted As in the presence of Ge in Ge(x)Si(1-x)/Si layered alloys using trace element accelerator mass spectrometry

Date: December 11, 2000
Creator: Datar, Sameer A.; Wu, Liying; Guo, Baonian N.; Nigam, Mohit; Necsoiu, Daniela; Zhai, Y. J. et al
Description: This article discusses high sensitivity measurement of implanted As in the presence of Ge in Ge(x)Si(1-x)/Si layered alloys using trace element accelerator mass spectrometry. Abstract: Various devices can be realized on strained GeSi/Si substrates by doping the substrate with different impurities such as As. As is an n-type dopant in both Ge and Si. As cross contamination can also arise during germanium preamorphization implantation due to inadequate mass resolution in the implanter. Thus, it is important to be able to accurately measure low-level As concentrations in the presence of Ge. Secondary ion mass spectrometry (SIMS) is the standard technique for these types of measurements but is constrained by mass interferences from molecular ions (⁷⁴GeH, ²⁹Si³⁰Si¹⁶O). The trace element accelerator mass accelerator technique allows the breakup of interfering molecules. As is measured in a GeSi matrix with sensitivity significantly better than SIMS.
Contributing Partner: UNT College of Arts and Sciences
Ion Beam Analyses of Carbon Nanotubes

Ion Beam Analyses of Carbon Nanotubes

Date: January 7, 2005
Creator: Naab, Fabian U.; Holland, Orin W.; Duggan, Jerome L. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
Description: This article discusses ion beam analyses of carbon nanotubes. Abstract: The utility of ion beam analysis (IBA) techniques to quantitatively determine impurities in carbon nanotubes (CNTs) over a wide range of atomic numbers is demonstrated. Such techniques have not previously been used to monitor impurities and their effects in this unique material. Despite the difficulty in mounting the samples (which generally are formed into a powdery aggregate rather rather in a thin film), it is shown that reliable and accurate measurements of impurity concentrations can be achieved. Particle-induced X-ray emission (PIXE) and elastic recoil detection (ERD) analyses were used to characterize both metallic and very light (e.g., hydrogen) impurities in CNTs. This paper reports the first direct measurement of hydrogen in CNTs using an IBA technique. This is significant because CNTs are being actively investigated for hydrogen storage technology for energy applications.
Contributing Partner: UNT College of Arts and Sciences
K-shell ionization of elements ₁₅P to ₂₈Ni for 0.4 to 3.8 MeV/amu ₅¹⁰B-ion bombardment

K-shell ionization of elements ₁₅P to ₂₈Ni for 0.4 to 3.8 MeV/amu ₅¹⁰B-ion bombardment

Date: August 1978
Creator: Monigold, G.; McDaniel, Floyd Del. (Floyd Delbert), 1942-; Duggan, Jerome L.; Rice, R.; Toten, A.; Mehta, R. et al
Description: This article discusses K-shell ionization of elements ₁₅P to ₂₈Ni for 0.4 to 3.8 MeV/amu ₅¹⁰B-ion bombardment. Abstract: K-shell x-ray production cross sections, Kβ/Kα x-ray intensity ratios and Kα and Kβ x-ray energy shifts have been determined for thin solid targets of ₁₅P, ₁₉K, ₂₀Ca, ₂₁Sc, ₂₂Ti, ₂₃V, ₂₅Mn, ₂₆Fe, ₂₇Co, and ₂₈Ni for 4-38-MeV ₅¹⁰B ion bombardment. Comparisons of the cross sections were made to direct Coulomb ionization and electron-capture theories by means of fluorescence yields corrected for multiple-ionization effects. The dominant contribution to K-vacancy production for these projectile-target combinations is believed to be direct ionization. Electron capture is expected to be important only for the lighter target elements and then primarily at the higher velocities. The direct-ionization theories employed were the binary-encounter approximation and the plane-wave Born approximation (PWBA) both of which overestimated the experimental data especially at the lower incident ion velocities. The PWBA was modified for increased target-electron binding, Coulomb deflection of the incident ion, polarization of the target-electron wave functions due to the passage of the incident ion, and relativistic target-electron velocities. The experimental data were found to agree quite well with the sum of the theoretical predictions of the modified PWBA and electron capture.
Contributing Partner: UNT College of Arts and Sciences
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