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Adherence/Diffusion Barrier Layers for Copper Metallization: Amorphous Carbon:Silicon Polymerized Films

Adherence/Diffusion Barrier Layers for Copper Metallization: Amorphous Carbon:Silicon Polymerized Films

Date: May 2004
Creator: Pritchett, Merry
Description: Semiconductor circuitry feature miniaturization continues in response to Moore 's Law pushing the limits of aluminum and forcing the transition to Cu due to its lower resistivity and electromigration. Copper diffuses into silicon dioxide under thermal and electrical stresses, requiring the use of barriers to inhibit diffusion, adding to the insulator thickness and delay time, or replacement of SiO2 with new insulator materials that can inhibit diffusion while enabling Cu wetting. This study proposes modified amorphous silicon carbon hydrogen (a-Si:C:H) films as possible diffusion barriers and replacements for SiO2 between metal levels, interlevel dielectric (ILD), or between metal lines (IMD), based upon the diffusion inhibition of previous a-Si:C:H species expected lower dielectric constants, acceptable thermal conductivity. Vinyltrimethylsilane (VTMS) precursor was condensed on a titanium substrate at 90 K and bombarded with electron beams to induce crosslinking and form polymerized a-Si:C:H films. Modifications of the films with hydroxyl and nitrogen was accomplished by dosing the condensed VTMS with water or ammonia before electron bombardment producing a-Si:C:H/OH and a-Si:C:H/N and a-Si:C:H/OH/N polymerized films in expectation of developing films that would inhibit copper diffusion and promote Cu adherence, wetting, on the film surface. X-ray Photoelectron Spectroscopy was used to characterize Cu metallization of ...
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Adhesion/diffusion barrier layers for copper integration: carbon-silicon polymer films and tantalum substrates

Adhesion/diffusion barrier layers for copper integration: carbon-silicon polymer films and tantalum substrates

Date: December 1999
Creator: Chen, Li
Description: The Semiconductor Industry Association (SIA) has identified the integration of copper (Cu) with low-dielectric-constant (low-k) materials as a critical goal for future interconnect architectures. A fundamental understanding of the chemical interaction of Cu with various substrates, including diffusion barriers and adhesion promoters, is essential to achieve this goal. The objective of this research is to develop novel organic polymers as Cu/low-k interfacial layers and to investigate popular barrier candidates, such as clean and modified tantalum (Ta) substrates. Carbon-silicon (C-Si) polymeric films have been formed by electron beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors on metal substrates under ultra-high vacuum (UHV) conditions. Temperature programmed desorption (TPD) studies show that polymerization is via the vinyl groups, while Auger electron spectroscopy (AES) results show that the polymerized films have compositions similar to the precursors. Films derived from vinyltrimethyl silane (VTMS) are adherent and stable on Ta substrates until 1100 K. Diffusion of deposited Cu overlayers is not observed below 800 K, with dewetting occurred only above 400 K. Hexafluorobenzene moieties can also be incorporated into the growing film with good thermal stability. Studies on the Ta substrates demonstrate that even sub-monolayer coverages of oxygen or carbide on polycrystalline ...
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Adjective Negation in English

Adjective Negation in English

Date: August 1962
Creator: Purcell, James S.
Description: It is the purpose of this study to provide a survey of the way in which words combine with negative prefixes to form negative adjectives.
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Adjustment of Kindergarten Children through Play Sessions Facilitated by Fifth Grade Students Trained in Child-Centered Play Therapy Procedures and Skills

Adjustment of Kindergarten Children through Play Sessions Facilitated by Fifth Grade Students Trained in Child-Centered Play Therapy Procedures and Skills

Date: May 1999
Creator: Baggerly, Jennifer N. (Jennifer Nalini)
Description: This research study investigated the effectiveness of the application of child-centered play therapy procedures and skills by trained fifth grade students in play sessions with kindergarten children who had adjustment difficulties. Specifically, this research determined if play sessions with trained fifth grade students facilitated change in kindergarten children's self concept, internalizing behavior, and externalizing behavior and their parents' stress level.
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Adlerian Personality Priorities of Siblings of Individuals with Tourette Syndrome

Adlerian Personality Priorities of Siblings of Individuals with Tourette Syndrome

Date: August 1998
Creator: Sims, Deanna
Description: This study was designed to examine Adlerian personality priorities of siblings of individuals with Tourette Syndrome (TS). This study aimed to investigate whether a difference exists between TS siblings and siblings of those without disabilities on variables related to personality priorities. It was hypothesized that TS siblings would score significantly higher than the control group on the superiority and pleasing personality priorities and significantly lower on the comfort and control personality priorities. Both of the hypotheses were rejected. First, no significant difference was found between TS siblings and the control group on the superiority and pleasing personality priorities. Second, no significant difference was found between TS siblings and the control group on the comfort personality priority, and TS siblings scored significantly higher than the control group on the control personality priority.
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Adlerian Play Therapy: Effectiveness on Disruptive Behaviors of Early Elementary-Aged Children

Adlerian Play Therapy: Effectiveness on Disruptive Behaviors of Early Elementary-Aged Children

Date: August 2010
Creator: Meany-Walen, Kristin K.
Description: Approximately 20% of children experience serious mental health problems severe enough to meet diagnosis criteria, and less than one third of these children receive the services they need. Identifying effective school-based counseling interventions provides a viable and accessible solution, especially for families with financial barriers. This randomized, controlled outcome study examined the effectiveness of Adlerian play therapy (AdPT) compared to reading mentoring (RM) with 58 kindergarten through third grade students who qualified with clinical levels of disruptive behavior in the classroom. Participants were identified as 48% Latino, 33% European American, and 19% African American. Approximately four-fifths of participants were male. Children were randomly assigned to AdPT (experimental group) or RM (active control group) for 16 sessions of treatment. Children in both groups participated in twice weekly, individual, 30-minute interventions that took place in their schools. Results from a two (group) by two (repeated measures) split plot ANOVA indicated that, compared to the RM group over time, the AdPT group demonstrated statistically significant improvement on (a) disruptive behaviors in the classroom, as directly observed by objective raters and as reported by teachers, and (b) stress in the teacher-child relationship, as reported by teachers. Teachers and observers were blinded to children's treatment ...
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Administering the Use of Instructional Space in Texas State-Supported Colleges and Universities

Administering the Use of Instructional Space in Texas State-Supported Colleges and Universities

Date: August 1957
Creator: Craig, Robert E.
Description: The problem of this study is to determine the administrative practices for securing the optimum use of instructional space in colleges. This necessitates the development of an instrument to evaluate these practices.
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The Administration of Spain Under Charles V, Spain's New Charlemagne

The Administration of Spain Under Charles V, Spain's New Charlemagne

Date: May 2005
Creator: Beard, Joseph
Description: Charles I, King of Spain, or Charles V, Holy Roman Emperor, was the most powerful ruler in Europe since Charlemagne. With a Germanic background, and speaking French, Charles became King of Spain in 1516. Yet secondary sources and available sixteenth century Spanish sources such as Spanish Royal Council records, local records of Castro Urdiales in Castile, and Charles's correspondence show that he continued the policies of his predecessors in Spain, Ferdinand of Aragon and Isabella of Castile. He strove to strengthen his power and unify Spain and his empire using Castilian strength, a Castilian model of government, Roman law, religion, his strong personality, and a loyal and talented bureaucracy. Charles desired to be another Charlemagne, but with his base of power in Spain.
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Administration of the Atlantic Blockade 1861-1865

Administration of the Atlantic Blockade 1861-1865

Date: January 1967
Creator: Delafield ,Charles Henry
Description: The purpose of this paper is to show in detail the role of only a portion of the Federal Navy, the Atlantic Blockading Squadrons, during the Civil War.
Contributing Partner: UNT Libraries
Administrative Activities of High School and Elementary School Principals with Respect to some Democratic Procedures

Administrative Activities of High School and Elementary School Principals with Respect to some Democratic Procedures

Date: 1947
Creator: Clayton, Irvin
Description: The purpose of this study is two-fold: (1) to determine democratic procedures as they apply to administrative activities, and (2) to compare the activities of high school principals with those of elementary school principals with respect to democratic procedures.
Contributing Partner: UNT Libraries