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 Degree Discipline: Materials Science and Engineering
Study of Gate Electrode Materials on High K Dielectrics

Study of Gate Electrode Materials on High K Dielectrics

Date: August 2003
Creator: Yao, Chun
Description: This problem in lieu of thesis report presents a study on gate electrode materials on high K dielectrics, including poly-SiGe and Ru. The stability of poly-SiGe in direct contact with Hf silicon-oxynitride (HfSiON) is studied by rapid thermal annealing (RTA), Rutherford backscattering spectrometry (RBS), X-ray photoelectron spectroscopy (XPS) and high resolution transmission electron microscopy (HRTEM). By performing a series of RTA treatments we found that as RTA thermal budgets reach 1050 C for 30s, the poly-SiGe layer begins to intermix with the HfSiON film, as observed by TEM. The maximum annealing condition for the Hf0.14Si0.23O0.46N0.17 film to remain stable in contact with poly-SiGe is 1050 C for 20s in high purity N2(99.9%) ambient. We also found that after 1000 C annealing for 60s in a nitrogen ambient, the poly-SiGe crystal phase structure was changed from a columnar structure to a large grain structure. For a metal gate, Ru was studied to determine N2annealing effects on sheet resistance of Ru sample electrodes and electrical characterization of Ru/HfSiOx/Si stack. Results show that a pure Ru metal gate is not a good choice for high k materials since it is hard to etch off, and different annealing conditions can cause large changes in ...
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Study of lead sorption on magnetite at high temperatures.

Study of lead sorption on magnetite at high temperatures.

Date: December 2006
Creator: Paliwal, Vaishali
Description: Lead's uptake on magnetite has been quantitatively evaluated in the present study at a temperature of 200°C and pH of 8.5 with lead concentrations ranging from 5 ppm to175 ppm by equilibrium adsorption isotherms. The pH independent sorption behavior suggested lead sorption due to pH independent permanent charge through weak electrostatic, non-specific attraction where cations are sorbed on the cation exchange sites. The permanent negative charge could be a consequence of lead substitution which is supported by increase in the lattice parameter values from the X-ray diffraction (XRD) results. Differential scanning calorimetry (DSC/TGA) results showed an increase of exothermic (magnetite to maghemite transformation) peak indicating substitution of lead ions due to which there is retardation in the phase transformation. Presence of outer sphere complexes and physical sorption is further supported by Fourier transformed infrared spectroscopy (FTIR). None of the results suggested chemisorption of lead on magnetite.
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Supercritical CO2 foamed biodegradable polymer blends of polycaprolactone and Mater-Bi.

Supercritical CO2 foamed biodegradable polymer blends of polycaprolactone and Mater-Bi.

Date: December 2007
Creator: Ogunsona, Emmanuel Olusegun
Description: Supercritical CO2 foam processing of biopolymers represents a green processing route to environmentally friendly media and packaging foams. Mater-Bi, a multiconstituent biopolymer of polyester, starch and vegetable oils has shown much promise for biodegradation. The polymer, however, is not foamable with CO2 so blended with another polymer which is. Polycaprolactone is a biopolymer with potential of 4000% change in volume with CO2. Thus we investigate blends of Mater-Bi (MB) and polycaprolactone (PCL) foamed in supercritical CO2 using the batch process. Characterization of the foamed and unfoamed samples were done using X-ray diffraction (XRD), differential scanning calorimetry (DSC) and scanning electron microscopy (SEM). Micrographs of the samples from the SEM revealed that the cell size of the foams reduced and increased with increase in MB concentration and increase in the foaming temperature respectively. Mechanical tests; tensile, compression, shear and impact were performed on the foamed samples. It was noted that between the 20-25% wt. MB, there was an improvement in the mechanical properties. This suggests that at these compositions, there is a high interaction between PCL and MB at the molecular level compared to other compositions. The results indicate that green processing of polymer blends is viable.
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Supercritical Silylation and Stability of Silyl Groups

Supercritical Silylation and Stability of Silyl Groups

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Date: May 2006
Creator: Nerusu, Pawan Kumar
Description: Methylsilsesquioxane (MSQ) and organosilicate glass (OSG) are the materials under this study because they exhibit the dielectric constant values necessary for future IC technology requirements. Obtaining a low-k dielectric value is critical for the IC industry in order to cope time delay and cross talking issues. These materials exhibit attractive dielectric value, but there are problems replacing conventional SiO2, because of their chemical, mechanical and electrical instability after plasma processing. Several techniques have been suggested to mitigate process damage but supercritical silylation offers a rapid single repair step solution to this problem. Different ash and etch damaged samples were employed in this study to optimize an effective method to repair the low-k dielectric material and seal the surface pores via supercritical fluid processing with various trialkylchlorosilanes. Fourier transform infrared spectroscopy (FTIR), contact angle, capacitance- voltage measurements, and x-ray photoemission spectroscopy, dynamic secondary ion mass spectroscopy (DSIMS), characterized the films. The hydrophobicity and dielectric constant after exposure to elevated temperatures and ambient conditions were monitored and shown to be stable. The samples were treated with a series of silylating agents of the form R3-Si-Cl where R is an alkyl groups (e.g. ethyl, propyl, isopropyl). Reactivity with the surface hydroxyls was inversely ...
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Surface Engineering and Characterization of Laser Deposited Metallic Biomaterials

Surface Engineering and Characterization of Laser Deposited Metallic Biomaterials

Date: May 2007
Creator: Samuel, Sonia
Description: Novel net shaping technique Laser Engineered Net shaping™ (LENS) laser based manufacturing solution (Sandia Corp., Albuquerque, NM); Laser can be used to deposit orthopedic implant alloys. Ti-35Nb-7Zr-5Ta (TNZT) alloy system was deposited using LENS. The corrosion resistance being an important prerequisite was tested electrochemically and was found that the LENS deposited TNZT was better than conventionally used Ti-6Al-4V in 0.1N HCl and a simulated body solution. A detailed analysis of the corrosion product exhibited the presence of complex oxides which are responsible for the excellent corrosion resistance. In addition, the in vitro tests done on LENS deposited TNZT showed that they have excellent biocompatibility. In order to improve the wear resistance of the TNZT system boride reinforcements were carried out in the matrix using LENS processing. The tribological response of the metal matrix composites was studied under different conditions and compared with Ti-6Al-4V. Usage of Si3N4 balls as a counterpart in the wear studies showed that there is boride pullout resulting in third body abrasive wear with higher coefficient of friction (COF). Using 440C stainless steel balls drastically improved the COF of as deposited TNZT+2B and seemed to eliminate the effect of “three body abrasive wear,” and also exhibited superior ...
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Synthesis and Characterization of Crystalline Assemblies of Functionalized Hydrogel Nanoparticles

Synthesis and Characterization of Crystalline Assemblies of Functionalized Hydrogel Nanoparticles

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Date: December 2005
Creator: Cai, Tong
Description: Two series monodispersed nanoparticles of hydroxylpropyl cellulose (HPC) and functionalized poly-N-isopropylamide (PNIPAM) particles have been synthesized and used as building blocks for creating three-dimensional networks, with two levels of structural hierarchy. The first level is HPC nanoparticles were made from methacrylated or degradable cross-linker attached HPC. These nanoparticles could be stabilized at room temperature by residual methacrylate or degradable groups are present both within and on the exterior of HPC nanoparticles. Controlled release studies have been performed on the particle and networks .The nearly monodispersed nanoparticles have been synthesized on the basis of a natural polymer of hydropropylcellulose (HPC) with a high molecular weight using the precipitation polymerization method and self-assembly of these particles in water results in bright colors. The HPC nanoparticles can be potential using as crosslinkers to increase the hydrogels mechanical properties, such as high transparency and rapid swelling/de-swelling kinetics. The central idea is to prepare colloidal particles containing C=C bonds and to use them as monomers - vinylparticles, to form stable particle assemblies with various architectures. This is accomplished by mixing an aqueous suspension of hydrogel nanoparticles (PNIPAM-co-allylamine) with the organic solvent (dichloromethane) to grow columnar crystals. The hydrogels with such a unique crystal structure behavior ...
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Synthesis and characterization of crystalline assembly of poly Nisopropylacry-lamide)-co-acrylic acid nanoparticles.

Synthesis and characterization of crystalline assembly of poly Nisopropylacry-lamide)-co-acrylic acid nanoparticles.

Date: December 2004
Creator: Zhou, Bo
Description: In this study, crystalline poly(N-isopropylacrylamide-co-acrylic acid) (PNIPAm-co-AAc) nanoparticle network in organic solvents was obtained by self assembling precursor particles in acetone/epichlorohydrin mixture at room temperature followed by inter-sphere crosslinking at ~98 °C. The crystals thus formed can endure solvent exchanges or large distortions under a temporary compressing force with the reoccurrence of crystalline structures. In acetone, the crystals were stable, independent of temperature, while in water crystals could change their colors upon heating or changing pH values. By passing a focused white light beam through the crystals, different colors were displayed at different observation angles, indicating typical Bragg diffraction. Shear moduli of the gel nanoparticle crystals were measured in the linear stress-yield ranges for the same gel crystals in both acetone and water. Syntheses of particles of different sizes and the relationship between particle size and the color of the gel nanoparticle networks at a constant solid content were also presented. Temperature- and pH- sensitive crystalline PNIPAm-co-AAc hydrogel was prepared using osmosis crosslinking method. Not only the typical Bragg diffraction phenomenon was observed for the hydrogel but also apparent temperature- and pH- sensitive properties were performed. The phase behavior of PNIPAm nanoparticles dispersed in water was also investigated using a ...
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Thermophysical, Interfacial and Decomposition Analyses of Polyhydroxyalkanoates introduced against Organic and Inorganic Surfaces

Thermophysical, Interfacial and Decomposition Analyses of Polyhydroxyalkanoates introduced against Organic and Inorganic Surfaces

Date: December 2009
Creator: Dagnon, Koffi Leonard
Description: The development of a "cradle-to-cradle" mindset with both material performance during utilization and end of life disposal is a critical need for both ecological and economic considerations. The main limitation to the use of the biopolymers is their mechanical properties. Reinforcements are therefore a good alternative but disposal concerns then arise. Thus the objective of this dissertation is to investigate a biopolymer nanocomposite where the filler is a synthetically prepared layer double hydroxide (inorganic interface); and a biopolymer paper (organic interface) based coating or laminate. The underlying issues driving performance are the packing density of the biopolymer and the interaction with the reinforcement. Since the polyhydroxyalkanoates or PHAs (the biopolymers used for the manufacture of the nanocomposites and coatings) are semicrystalline materials, the glass transition was investigated using dynamic mechanical analysis (DMA) and dielectric spectroscopy (DES), whereas the melt crystallization, cold crystallization and melting points were investigated using differential scanning calorimetry (DSC). Fourier transform infrared (FTIR) spectroscopy was used to estimate crystallinity in the coated material given the low thermal mass of the PHA in the PHA coating. The significant enhancement of the crystallization rate in the PHA nanocomposite was probed using DSC and polarized optical microscopy (POM) and analyzed ...
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Topics in micro electromechanical systems: MEMS engineering and alternative materials for MEMS fabrication.

Topics in micro electromechanical systems: MEMS engineering and alternative materials for MEMS fabrication.

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Date: August 2004
Creator: Chapla, Kevin
Description: This paper deals with various topics in micro electromechanical systems (MEMS) technology beginning with microactuation, MEMS processing, and MEMS design engineering. The fabrication and testing of three separate MEMS devices are described. The first two devices are a linear stepping motor and a continuous rotary motor, respectively; and were designed for the purpose of investigating the frictional and wear properties of silicon components. The third device is a bi-stable microrelay, in which electrical current conducts through a secondary circuit, via a novel probe-interconnect mechanism. The second half focuses on engineering a carbon nanotube / SU-8 photoepoxy nanocomposite for fabricating MEMS devices. A processing method for this material as well as the initial results of characterization, are discussed.
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Trapping of hydrogen in Hf-based high κ dielectric thin films for advanced CMOS applications.

Trapping of hydrogen in Hf-based high κ dielectric thin films for advanced CMOS applications.

Date: December 2007
Creator: Ukirde, Vaishali
Description: In recent years, advanced high κ gate dielectrics are under serious consideration to replace SiO2 and SiON in semiconductor industry. Hafnium-based dielectrics such as hafnium oxides, oxynitrides and Hf-based silicates/nitrided silicates are emerging as some of the most promising alternatives to SiO2/SiON gate dielectrics in complementary metal oxide semiconductor (CMOS) devices. Extensive efforts have been taken to understand the effects of hydrogen impurities in semiconductors and its behavior such as incorporation, diffusion, trapping and release with the aim of controlling and using it to optimize the performance of electronic device structures. In this dissertation, a systematic study of hydrogen trapping and the role of carbon impurities in various alternate gate dielectric candidates, HfO2/Si, HfxSi1-xO2/Si, HfON/Si and HfON(C)/Si is presented. It has been shown that processing of high κ dielectrics may lead to some crystallization issues. Rutherford backscattering spectroscopy (RBS) for measuring oxygen deficiencies, elastic recoil detection analysis (ERDA) for quantifying hydrogen and nuclear reaction analysis (NRA) for quantifying carbon, X-ray diffraction (XRD) for measuring degree of crystallinity and X-ray photoelectron spectroscopy (XPS) were used to characterize these thin dielectric materials. ERDA data are used to characterize the evolution of hydrogen during annealing in hydrogen ambient in combination with preprocessing in ...
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