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- Advanced Technology for Source Drain Resistance Reduction in Nanoscale FinFETs
- Dual gate MOSFET structures such as FinFETs are widely regarded as the most promising option for continued scaling of silicon based transistors after 2010. This work examines key process modules that enable reduction of both device area and fin width beyond requirements for the 16nm node. Because aggressively scaled FinFET structures suffer significantly degraded device performance due to large source/drain series resistance (RS/D), several methods to mitigate RS/D such as maximizing contact area, silicide engineering, and epitaxially raised S/D have been evaluated.
- Precession Electron Diffraction Assisted Characterization of Deformation in α and α+β Titanium Alloys
- Ultra-fine grained materials with sub-micrometer grain size exhibit superior mechanical properties when compared with conventional fine-grained material as well as coarse-grained materials. Severe plastic deformation (SPD) techniques have been shown to be an effective way to modify the microstructure in order to improve the mechanical properties of the material. Crystalline materials require dislocations to accommodate plastic strain gradients and maintain lattice continuity. The lattice curvature exists due to the net dislocation that left behind in material during deformation. The characterization of such defects is important to understand deformation accumulation and the resulting mechanical properties of such materials. However, traditional techniques are limited. For example, the spatial resolution of EBSD is insufficient to study materials processed via SPD, while high dislocation densities make interpretations difficult using conventional diffraction contrast techniques in the TEM. A new technique, precession electron diffraction (PED) has gained recognition in the TEM community to solve the local crystallography, including both phase and orientation, of nanocrystalline structures under quasi-kinematical conditions. With the assistant of precession electron diffraction coupled ASTARÔ, the structure evolution of equal channel angular pressing processed commercial pure titanium is studied; this technique is also extended to two-phase titanium alloy (Ti-5553) to investigate the existence of anisotropic deformation behavior of the constituent alpha and beta phases.
- Thin Films As a Platform for Understanding the Conversion Mechanism of FeF2 Cathodes in Lithium-Ion Microbatteries
- Conversion material electrodes such as FeF2 possess the potential to deliver transformative improvements in lithium ion battery performance because they permit a reversible change of more than one Li-ion per 3d metal cation. They outperform current state of the art intercalation cathodes such as LiCoO2, which have volumetric and gravimetric energy densities that are intrinsically limited by single electron transfer. Current studies focus on composite electrodes that are formed by mixing with carbon (FeF2-C), wherein the carbon is expected to act as a binder to support the matrix and facilitate electronic conduction. These binders complicate the understanding of the electrode-electrolyte interface (SEI) passivation layer growth, of Li agglomeration, of ion and electron transport, and of the basic phase transformation processes under electrochemical cycling. This research uses thin-films as a model platform for obtaining basic understanding to the structural and chemical foundations of the phase conversion processes. Thin film cathodes are free of the binders used in nanocomposite structures and may potentially provide direct basic insight to the evolution of the SEI passivation layer, electron and ion transport, and the electrochemical behavior of true complex phases. The present work consisted of three main tasks (1) Development of optimized processes to deposit FeF2 and LiPON thin-films with the required phase purity and microstructure; (2) Understanding their electron and ion transport properties and; (3) Obtaining insight to the correlation between structure and capacity in thin-film microbatteries with FeF2 thin-film cathode and LiPON thin-film solid electrolyte. Optimized pulsed laser deposition (PLD) growth produced polycrystalline FeF2 films with excellent phase purity and P42/mnm crystallographic symmetry. A schematic band diagram was deduced using a combination of UPS, XPS and UV-Vis spectroscopies. Room temperature Hall measurements reveal that as-deposited FeF2 is n-type with an electron mobility of 0.33 cm2/V.s and a resistivity was 0.255 Ω.cm. The LiPON …
- Workfunction tuning of AZO Films Through Surface Modification for Anode Application in OLEDs.
- Widespread use of organic light emitting diodes (OLEDs) in solid state lighting and display technologies require efficiency and lifetime improvements, as well as cost reductions, inclusive of the transparent conducting oxide (TCO). Indium tin oxide (ITO) is the standard TCO anode in OLEDs, but indium is expensive and the Earth's reserve of this element is limited. Zinc oxide (ZnO) and its variants such as aluminum-doped ZnO (AZO) exhibit comparable electrical conductivity and transmissivity to ITO, and are of interest for TCO applications. However, the workfunction of ZnO and AZO is smaller compared to ITO. The smaller workfunction of AZO results in a higher hole injection barrier at the anode/organic interface, and methods of tuning its workfunction are required. This dissertation tested the hypothesis that workfunction tuning of AZO films could be achieved by surface modification with electronegative oxygen and fluorine plasmas, or, via use of nanoscale transition metal oxide layers (MoOx, VOx and WOx). Extensive UPS, XPS and optical spectroscopy studies indicate that O2 and CFx plasma treatment results in an electronegative surface, surface charge redistribution, and a surface dipole moment which reinforces the original surface dipole leading to workfunction increases. Donor-like gap states associated with partially occupied d-bands due to non-stoichiometry determine the effective increased workfunction of the AZO/transition-metal oxide stacks. Reduced hole injection barriers were engineered by ensuring that the surface ad-layers were sufficiently thin to facilitate Fowler-Nordheim tunneling. Improved band alignments resulted in improved hole injection from the surface modified AZO anodes, as demonstrated by I-V characterization of hole only structures. Energy band alignments are proposed based on the aforementioned spectroscopies. Simple bilayer OLEDs employing the surface modified AZO anodes were fabricated and characterized to compare their performance with standard ITO. Anodes consisting of AZO with MoOx or VOx interfacial layers exhibited 50% and 71% improvement in …
- Defect Behaviors in Zinc Oxide and Zinc Titanates Ceramics from First Principles Computer Simulations
- ZnO and ZnO-TiO2 ceramics have intriguing electronic and mechanical properties and find applications in many fields. Many of these properties and applications rely on the understanding of defects and defect processes in these oxides as these defects control the electronic, catalytic and mechanical behaviors. The goal of this dissertation is to systematically study the defects and defects behaviors in Wurtzite ZnO and Ilmenite ZnTiO3 by using first principles calculations and classical simulations employing empirical potentials. Firstly, the behavior of intrinsic and extrinsic point defects in ZnO and ZnTiO3 ceramics were investigated. Secondly, the effect of different surface absorbents and surface defects on the workfunction of ZnO were studied using DFT calculations. The results show that increasing the surface coverage of hydrocarbons decreased the workfunction. Lastly, the stacking fault behaviors on ilmenite ZnTiO3 were investigated by calculating the Generalized Stacking Fault (GSF) energies using density functional theory based first principles calculations and classical calculations employing effective partial charge inter-atomic potentials. The gamma-surfaces of two low energy surfaces, (110) and (104), of ZnTiO3 were fully mapped and, together with other analysis such as ideal shear stress calculations.
- Design and Manufacture of Molding Compounds for High Reliability Microelectronics in Extreme Conditions
- The widespread use of electronics in more avenues of consumer use is increasing. Applications range from medical instrumentation that directly can affect someone's life, down hole sensors for oil and gas, aerospace, aeronautics, and automotive electronics. The increased power density and harsh environment makes the reliability of the packaging a vital part of the reliability of the device. The increased importance of analog devices in these applications, their high voltage and high temperature resilience is resulting in challenges that have not been dealt with before. In particular packaging where insulative properties are vital use polymer resins modified by ceramic fillers. The distinct dielectric properties of the resin and the filler result in charge storage and release of the polarization currents in the composite that have had unpredictable consequences on reliability. The objective of this effort is therefore to investigate a technique that can be used to measure the polarization in filled polymer resins and evaluate reliable molding compounds. A valuable approach to measure polarization in polymers where charge release is tied to the glass transition in the polymer is referred to as thermally stimulated depolarization current (TSDC) technique. In this dissertation a new TSDC measurement system was designed and fabricated. The instrument is an assembly of several components that are automated via a LabVIEW program that gives the user flexibility to test different dielectric compounds at high temperatures and high voltage. The temperature control is enabled through the use of dry air convection heating at a very slow rate enabling controlled heating and cooling. Charge trapping and de-trapping processes were investigated in order to obtain information on insulating polymeric composites and how to optimize it. A number of material properties were investigated. First, polarization due to charges on the filer were investigated using composites containing charged and uncharged particles using …
- The Role of Misfit Strain and Oxygen Content on Formation and Evolution of Omega Precipitate in Metastable Beta-titanium Alloys
- β-Ti alloys are widely used in airframe and biomedical applications due to their high ductility, high hardenability, and low elastic modulus. The phase transformations in β-Ti alloys are rather complex due to formation of metastable phases during various thermo-mechanical treatments. One such critical metastable phase, the hexagonal omega (ω) phase, can form in β-Ti alloys under quenching from the high temperature β phase and/or isothermal aging at intermediate temperature. Despite a substantial amount of reported works on the ω phase, there are several critical issues related to the ω formation need to be resolved, e.g. role of alloying elements and oxygen content. Therefore, this dissertation has attempted to provide insights into ω transformation in low misfit (Ti-Mo) and high misfit (Ti-V) binary systems as well as multicomponent (Ti-Nb-Zr-Ta) alloys. The evolution of ω structure, morphology and composition from the early stage (β-solution+quenched) to later stages after prolonged aging are systematically investigated by coupling transmission electron microscopy (TEM), atom probe tomography (APT) and high-energy synchrotron X-ray diffraction techniques. The influence of aging temperature and duration on characteristic of ω phase in Ti-Mo, and Ti-V alloys is addressed in details. It is found that compositional changes during aging can alter the structure, size and morphology of ω precipitates. In low misfit alloys, the ellipsoidal morphology of ω phase was retained during isothermal aging, while in high misfit alloys it changed from ellipsoidal to cuboidal morphology after prolonged aging. Secondly, ω transformation in biomedical Ti-Nb-Zr-Ta alloy is probed in which the micro-hardness was sensitive to microstructural changes. Furthermore, the evolution of oxygen concentration in ω precipitates during various aging conditions in binary Ti-Mo and Ti-V alloys are reported. It has been accepted that interstitial elements such as oxygen can largely alter mechanical behavior and the microstructure of Ti-alloys. Recently, oxygen is intentionally added …
- Substrate Nanotopography and Stiffness Modulation of Cell Behavior
- The physical characteristics (i.e., nanostructure and stiffness) of the extracellular matrix where cells reside have been shown to profoundly affect numerous cellular events in vivo and also been employed to modulate cell behavior in vitro, yet how these physical cues regulate cell behavior is still elusive. Therefore, we engineered a variety of nanotopographies with different shapes and dimensions, and investigated how the nanotopographical cue, through focal adhesions-cytoskeleton-nucleus pathway, affected cell phenotype and function. We further designed and fabricated well-defined substrates which had either identical biochemical cue (adhesive ligand presentation) but different nanotopographical cues or identical nanotopography but different biochemical cues, and dissected the roles of these cues in cell modulation. In addition, we revealed that the human mesenchymal stem cells (hMSCs) could obtain nanotopographical memory from the past culture environment, and the nanotopographical memory influenced the future fate decision of the hMSCs. Moreover, we evaluated the effects of substrate nanotopographical and stiffness cues on the fibrogenesis of human lung fibroblasts in response to carbon nanotubes and highlighted the significance of these physical cues in the development of physiologically relevant in vitro models for nanotoxicological study. The mechanistic understanding of the physical regulation of cell behaviors will provide important insight into the advancement of cell culture technologies and the recreation of biomimetic in vitro tissue/organ models.
- Linking Enhanced Fatigue Life to Design by Modifying the Microstructure
- Structural material fatigue is a leading cause of failure and has motivated fatigue-resistant design to eliminate risks to human lives. Intrinsic microstructural features alter fatigue deformation mechanisms so profoundly that, essentially, fatigue properties of structural materials become deviant. With this in mind, we initiated this project to investigate the microstructural effect on fatigue behavior of potential structural high entropy alloys. With a better understanding of the effect of microstructure features on fatigue properties, the ultimate goal was to engineer the microstructure to enhance the fatigue life of structural materials. The effects of two major deformation mechanisms presented here are twinning-induced fatigue crack retardation, and transformation-induced fatigue crack retardation. The fundamental principle of both mechanisms is to delay the fatigue crack propagation rate by altering the work hardening ability locally within the crack plastic zone. In ultrafine grained triplex Al0.3CoCrFeNi, nano-sized deformation twins were observed during cyclic loading in FCC matrix due to low stacking fault energy (SFE). The work-hardening ability of the material near the crack was sustained with the formation of twins according to Considere's criteria. Further, due to the ultrafine-grained (UFG) nature of the material, fatigue runout stress was enhanced. In a coarse-grained, dual-phase high entropy alloy, persistent slip bands formed in FCC matrix during cyclic loading due mainly to the slight composition change that affects the SFE in the FCC matrix and eventually alters the deformation mechanism. Another way known to alter an alloy's work hardening (WH) ability is transformation-induced plasticity (TRIP). In some alloys, phase transformation happens due to strain localization, which alters the work-hardening ability. iii In a fine-grained, dual-phase metastable high entropy alloy, gamma (f.c.c.) to epsilon (h.c.p.) transformation occurred in the plastic zone that was induced from cracks. Thus, we designed a Cu-containing FeMnCoCrSi high entropy alloy that exhibited a normalized fatigue ratio …
- In-situ Analysis of the Evolution of Surfaces and Interfaces under Applied Coupled Stresses
- To study the effect of the substrate support on the nanoscale contact, three different regimes, i.e., graphene on rigid (ultra-crystalline diamond) and on elastic (Polydimethylsiloxane) supports and free-standing graphene, were considered. The contribution of the graphene support to the mechanical and electrical characteristics of the graphene/metal contact was studied using the conductive atomic force microscopy (AFM) technique.The results revealed that the electrical conductivity of the graphene/metal contact highly depends on the nature of the graphene support. The conductivity increased when transitioning from suspended to elastic and then to rigid substrates, which is attributed to the changes in the contact area being higher for the suspended graphene and lower for the rigid substrate. The experimental observations showed good agreement with theoretical results obtained from modeling of the studied material systems. Further, the results indicated that in addition to the substrate support, the nature of the contact, static or dynamic, results in large variations of the electrical conductivity of the graphene/metal contacts. In case of the static mode, the contact made with supported graphene was very stable for a wide range of applied normal loads. Transitioning to the dynamic mode led to instability of the graphene/metal contact as demonstrated by lowering in the electrical conductivity values. This transition was even more pronounced for free-standing graphene which is attributed to graphene sagging during rapid scanning of the tip over the graphene surface. This study creates a new knowledge on understanding of the nanoscale contacts forming with 2D materials thus enabling further advances in the applications of 2D materials in highly stable and reliable electronic devices.
- Tribo-Corrosion of High Entropy Alloys
- In this dissertation, tribo-corrosion behavior of several single-phase and multi-phase high entropy alloys were investigated. Tribo-corrosion of body centered cubic MoNbTaTiZr high entropy alloy in simulated physiological environment showed very low friction coefficient (~ 0.04), low wear rate (~ 10-8 mm3/Nm), body-temperature assisted passivation, and excellent biocompatibility with respect to stem cells and bone forming osteoblast cells. Tribo-corrosion resistance was evaluated for additively manufactured face centered cubic CoCrFeMnNi high entropy alloy in simulated marine environment. The additively manufactured alloy was found to be significantly better than its as-cast counterpart which was attributed to the refined microstructure and homogeneous elemental distribution. Additively manufactured CoCrFeMnNi showed lower wear rate, regenerative passivation, less wear volume loss, and nobler corrosion potential during tribo-corrosion test compared to its as-cast equivalent. Furthermore, in the elevated temperature (100 °C) tribo-corrosion environment, AlCoCrFeNi2.1 eutectic high entropy alloy showed excellent microstructural stability and pitting resistance with an order of magnitude lower wear volume loss compared to duplex stainless steel. The knowledge gained from tribo-corrosion response and stress-corrosion susceptibility of high entropy alloys was used in the development of bio-electrochemical sensors to sense implant degradation. The results obtained herewith support the promise of high entropy alloys in outperforming currently used structural alloys in the harsh tribo-corrosion environment.
- Crystallization and Lithium Ion Diffusion Mechanism in the Lithium-Aluminum-Germanium-Phosphate Glass-Ceramic Solid Electrolytes
- NASCION-type lithium-aluminum-germanium-phosphate (LAGP) glass-ceramic is one of the most promising solid electrolyte (SEs) material for the next generation Li-ion battery. Based on the crystallization of glass-ceramic material, the two-step heat treatment was designed to control the crystallization of Li-ion conducting crystal in the glass matrix. The results show that the LAGP crystal is preferred to internally crystalize, Tg + 60%∆T is the nucleation temperature that provides the highest ion conductivity. The compositional investigation also found that, pure LAGP crystal phase can be synthesized by lowering the amount of GeO2. To fill gap of atomic structure in LAGP glass-ceramic, molecular dynamic (MD) simulation was used to build the crystal, glass, and interfacial structure LAGP. The aliovalent ion substitution induced an simultaneously redistribution of Li to the 36f interstitial site, and the rapid cooperative motion between the Li-ions at 36f can drop the activation energy of LAGP crystal by decreasing the relaxation energy; furthermore, an energy model was built based on the time-based analysis of Li-ion diffusion to articulate the behavior. The glass and interfacial structure show and accumulation of AlO4, GeO4 and Li at the interface, which explains the Li-trapping on the intergranular glass phase. An in-situ synchrotron X-ray study found that, by using two-step heat treatment, the nucleation of Li-ion conducting crystal in the glass-matrix induced large strain from interfacial tension, which can also promote the incorporation of aliovalent ion substitution in the NASICON crystal and enhances the ion conductivity.
- Materials Approaches for Transparent Electronics
- This dissertation tested the hypothesis that energy transferred from a plasma or plume can be used to optimize the structure, chemistry, topography, optical and electrical properties of pulsed laser deposited and sputtered thin-films of ZnO, a-BOxNy, and few layer 2H-WS2 for transparent electronics devices fabricated without substrate heating or with low substrate heating. Thus, the approach would be compatible with low-temperature, flexible/bendable substrates. Proof of this concept was demonstrated by first optimizing the processing-structure-properties correlations then showing switching from accumulation to inversion in ITO/a-BOxNy/ZnO and ITO/a-BOxNy/2H-WS2 transparent MIS capacitors fabricated using the stated processes. The growth processes involved the optimization of the individual materials followed by growing the multilayer stacks to form MIS structures. ZnO was selected because of its wide bandgap that is transparent over the visible range, WS2 was selected because in few-layer form it is transparent, and a-BOxNy was used as the gate insulator because of its reported atomic smoothness and low dangling bond concentration. The measured semiconductor-insulator interfacial trap properties fall in the range reported in the literature for SiO2/Si MOS structures. X-ray photoelectron spectroscopy (XPS), Hall, photoluminescence, UV-Vis absorption, and X-ray diffraction (XRD) measurements investigated the low-temperature synthesis of ZnO. All films are nanocrystalline with the (002) XRD planes becoming more prominent in films grown with lower RF power or higher pressure. Low power or high chamber pressure during RF magnetron sputtering resulted in a slower growth rate and lower energetic conditions at the substrate. Stoichiometry improved with RF power. The measurements show a decrease in carrier concentration from 6.9×1019 cm-3 to 1.4×1019 cm-3 as power increased from 40 W to 120 W, and an increase in carrier concentration from 2.6×1019 cm-3 to 8.6×1019 cm-3 as the deposition pressure increased from 3 to 9 mTorr. The data indicates that in the range of conditions used, …
- Microstructure Evolution and Mechanical Response of Material by Friction Stir Processing and Modeling
- In this study, we have investigated the relationship between the process-microstructure to predict and modify the material's properties. Understanding these relationships allows the identification and correction of processing deficiencies when the desired properties are not achieved, depending on the microstructure. Hence, the co-relation between process-microstructure-properties helped reduce the number of experiments, materials & tool costs and saved much time. In the case of high entropy alloys, friction stir welding (FSW) causes improved strength due to the formation of fine grain structure and phase transformation from f.c.c to h.c.p. The phase transformation is temperature sensitive and is studied with the help of differential scanning calorimetry (DSC) to calculate the enthalpy experimentally to obtain ΔGγ→ε. The second process discussed is heat treatment causing precipitation evolution. Fundamental investigations aided in understanding the influence of strengthening precipitates on mechanical properties due to the aging kinetics – solid solution and variable artificial aging temperature and time. Finally, in the third case, the effect of FSW parameters causes the thermal profile to be generated, which significantly influences the final microstructure and weld properties. Therefore, a computational model using COMSOL Multiphysics and TC-Prisma is developed to generate the thermal profile for different weld parameters to understand its effect on the microstructure, which would eventually affect and predict the final properties of the weld. The model's validation is done via DSC, TEM, and mechanical testing.
- Photophysical Interactions in Vapor Synthesized and Mechanically Exfoliated Two-Dimensional Conducting Crystallites for Quantum and Optical Sensing
- In the first study, superconducting 2D NbSe₂ was examined towards its prototypical demonstration as a transition-edge sensor, where photoexcitation caused a thermodynamic phase transition in NbSe₂ from the superconducting state to the normal state. The efficacy of the optical absorption was found to depend on the wavelength of the incoming radiation used, which ranged from the ultra-violet (405 nm), visible (660 nm), to the infrared (1060 nm). In the second case involving WSe₂, the UV-ozone treatment revealed the presence of localized excitonic emission in 1L WSe₂ that was robust and long-lived. Our third material platform dealt with hybrid 0D-2D ensembles based on graphene and WSe₂, specifically graphene–endohedral, WSe₂–fullerene (C₆₀), and WSe₂–Au nanoparticles, and exhibited exceptional performance gains achieved with both types of hybrid structures. Next, we investigated WSe₂ based mixed dimensional hybrids. Temperature T-dependent and wavelength λ-dependent optoelectronic transport measurements showed a shift in the spectral response of 1L WSe₂ towards the SPR peak locations of Au-Sp and Au-BP, fostered through the plexciton interactions. Models for the plexcitonic interactions are proposed that provide a framework for explaining the photoexcited hot charge carrier injection from AuNPs to WSe₂ and its influence on the carrier dynamics in these hybrid systems. Last, we studied interactions of vdWs hybrid structures composed of WSe₂ with 0D buckminsterfullerene (C₆₀) spheres. Our results indicate that the C₆₀-WSe₂ vdWs hybrid heterostructure appears to be an attractive architecture for enabling charge transfer and high performance photodetection capabilities. T-dependent electrical transport measurements after C₆₀ deposition revealed a dominant p-type conduction behavior and a significant ×10³ increase in WSe₂ field-effect mobility, with a maximum field-effect mobility of 281 cm²V⁻¹s⁻¹ achieved at 350 K and room-T mobility of 119.9 cm²V⁻¹s⁻¹ for the C₆₀-WSe₂ hybrid.
- Processing-Structure-Property Correlation for Additively Manufactured Metastable High Entropy Alloy
- In the present study both fusion based - laser powder bed fusion (LPBF), and solid state - additive friction stir deposition (AFSD) additive manufacturing processes were employed for the manufacturing of a metastable high entropy alloy (HEA), Fe40Mn20Co20Cr15Si5 (CS-HEA). A processing window was developed for the LPBF and AFSD processings of CS-HEA. In case of LPBF, formation of solidification related defects such as lack of fusion pores (for energy density ≤ 31.24 J/mm3) and keyhole pores (for energy density ≥ 75 J/mm3) were observed. Variation in processing conditions affected the microstructural evolution of the metastable CS-HEA; correlation between processing conditions and microstructure of the alloy is developed in the current study. The tendency to transform and twin near stress concentration sites provided excellent tensile and fatigue properties of the material despite the presence of defects in the material. Moreover, solid state nature of AFSD process avoids formation of solidification related defects. Defect free builds of CS-HEA using AFSD resulted in higher work hardening in the material. In summary, the multi-processing techniques used for CS-HEA in the present study showcase the capability of the AM process in tailoring the microstructure, i.e., grain size and phase fractions, both of which are extremely critical for the mechanical property enhancement of the alloy.