Local Phase Manipulation for Multi-Beam Interference Lithography for the Fabrication of Two and Three Dimensional Photonic Crystal Templates
Description:
In this work, we study the use of a spatial light modulator (SLM) for local manipulation of phase in interfering laser beams to fabricate photonic crystal templates with embedded, engineered defects. A SLM displaying geometric phase patterns was used as a digitally programmable phase mask to fabricate 4-fold and 6-fold symmetric photonic crystal templates. Through pixel-by-pixel phase engineering, digital control of the phases of one or more of the interfering beams was demonstrated, thus allo…
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Date:
December 2016
Creator:
Lutkenhaus, Jeffrey Ryan