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  Partner: UNT Libraries
 Department: Department of Chemistry
 Decade: 1990-1999
 Collection: UNT Theses and Dissertations
Adhesion/diffusion barrier layers for copper integration: carbon-silicon polymer films and tantalum substrates

Adhesion/diffusion barrier layers for copper integration: carbon-silicon polymer films and tantalum substrates

Date: December 1999
Creator: Chen, Li
Description: The Semiconductor Industry Association (SIA) has identified the integration of copper (Cu) with low-dielectric-constant (low-k) materials as a critical goal for future interconnect architectures. A fundamental understanding of the chemical interaction of Cu with various substrates, including diffusion barriers and adhesion promoters, is essential to achieve this goal. The objective of this research is to develop novel organic polymers as Cu/low-k interfacial layers and to investigate popular barrier candidates, such as clean and modified tantalum (Ta) substrates. Carbon-silicon (C-Si) polymeric films have been formed by electron beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors on metal substrates under ultra-high vacuum (UHV) conditions. Temperature programmed desorption (TPD) studies show that polymerization is via the vinyl groups, while Auger electron spectroscopy (AES) results show that the polymerized films have compositions similar to the precursors. Films derived from vinyltrimethyl silane (VTMS) are adherent and stable on Ta substrates until 1100 K. Diffusion of deposited Cu overlayers is not observed below 800 K, with dewetting occurred only above 400 K. Hexafluorobenzene moieties can also be incorporated into the growing film with good thermal stability. Studies on the Ta substrates demonstrate that even sub-monolayer coverages of oxygen or carbide on polycrystalline ...
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Aluminum and Copper Chemical Vapor Deposition on Fluoropolymer Dielectrics and Subsequent Interfacial Interactions

Aluminum and Copper Chemical Vapor Deposition on Fluoropolymer Dielectrics and Subsequent Interfacial Interactions

Date: December 1997
Creator: Sutcliffe, Ronald David
Description: This study is an investigation of the chemical vapor deposition (CVD) of aluminum and copper on fluoropolymer surfaces and the subsequent interfacial interactions.
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An Approach Towards the Total Synthesis of Clonostachydiol

An Approach Towards the Total Synthesis of Clonostachydiol

Date: August 1995
Creator: Maiti, Tushar B. (Tushar Baran)
Description: The syntheses of the unsymmetrical 14-membered bismacrolides have been reviewed. A total synthesis of clonostachydiol, the latest to join this family, has been attempted using trimethylsilyl acetylene as the builiding block and palladium catalyzed reactions for the formation of key bonds. The alkyne groups were introduced by Stille coupling of trimethylstannylethynyltrimethylsilane with an acid chloride for one fragment and by addition of lithiotrimethylsilyl acetylene to an aldehyde for the other. Lactic acid derivatives were chosen as starting materials for both fragments, thus introducing two of the chiral centers. The remaining stereocenters were introduced using stereoselective reductions of ketones.
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Chemical Equilibria in Binary Solvents

Chemical Equilibria in Binary Solvents

Date: August 1997
Creator: McHale, Mary E. R.
Description: Dissertation research involves development of Mobile Order Theory thermodynamic models to mathematically describe and predict the solubility, spectral properties, protonation equilibrium constants and two-phase partitioning behavior of solutes dissolved in binary solvent mixtures of analytical importance. Information gained provide a better understanding of solute-solvent and solvent-solvent interactions at the molecular level, which will facilitate the development of better chemical separation methods based upon both gas-liquid and high-performance liquid chromatography, and better analysis methods based upon complexiometric and spectroscopic methods. Dissertation research emphasizes chemical equilibria in systems containing alcohol cosolvents with the understanding that knowledge gained will be transferable to more environmentally friendly aqueous-organic solvent mixtures.
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Experimental and Theoretical Studies of Polycarbocyclic Compounds

Experimental and Theoretical Studies of Polycarbocyclic Compounds

Date: May 1998
Creator: Shukla, Rajesh, 1964-
Description: Part I. Diels-Alder cycloadditions of 1,2,3,4,9,9-hexachloro-1α,4α,4aα,8aβ-tetrahydro-l,4-methanonaphthalene (32) and 1,2,3,4,9,9-hexachloro-lα,4α,6,7- tetrahydro-l,4-methanonaphthalene (33) to 4-methyl- and 4-phenyl-l,2,4-triazoline-3,5-dione [MTAD and PTAD, respectively] and to N-methylmaleimide (NMM) have been studied. The structures of several of the resulting cycloadducts were determined by X-ray crystallographic methods. The observed stereoselectivity of each of these Diels-Alder reactions was further investigated via application of theoretical methods. Thus, semiempirical (AMI) and ab initio molecular orbital calculations were used to calculate relative energies. Ab initio calculations were employed to perform frontier molecular orbital analyses of diene-dienophile interactions.
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Explorations with polycarbocyclic cage compounds

Explorations with polycarbocyclic cage compounds

Date: August 1999
Creator: Chong, Hyun-Soon
Description: A variety of novel cage-functionalized pyridyl containing crown ethers have been prepared for use in selective alkali metal complexation studies. A highly preorganized, cage-functionalized cryptand also has been designed and has been synthesized for use as a selective Li+ complexant. The alkali metal picrate extraction profiles of these cage-functionalized crown ethers also have been studied. Novel cage-functionalized diazacrown ethers have been prepared for selective alkali metal complexation studies. Alkali metal picrate extraction experiments have been performed by using this new class of synthetic ionophores to investigate the effects of cage-annulation and the influence of N-pivot lariat sidearms upon their resulting complexation properties. Novel pyridyl containing calix[4]arene receptors were prepared. Analysis of their respective 1H NMR and 13C NMR spectra suggests that calix[4]arene moieties in the ligand occupy the cone conformation. The complexation properties of these host molecules were estimated by performing a series of alkali metal picrate extraction experiments. An optically active cage-functionalized crown ether which contains a binaphthyl moiety as the chiral unit was prepared. The ability of the resulting optically active crown ether to distinguish between enantiomers of guest ammonium ions (i.e., phenylethylamonium and phenylglycinate salts) in transport experiments was investigated. Hexacyclo[11.2.1.02,12.05,10.05,15.010,14]hexadeca-6,8-diene-4,11-dione was prepared from hexacyclo[7.4.2.01,9.03,7.04,14.06,15] pentadeca-10,12-diene-2,8-dione. Unanticipated ...
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Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface

Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface

Date: August 1995
Creator: Chien, Hsu-Yueh
Description: As the miniaturization keeps decreasing in semiconductor device fabrication, metal contamination on silicon surfaces becomes critical. An investigation of the fundamental mechanism of metal contamination process on silicon surface is therefore important. Kinetics and thermodynamics of the copper out-plating process on silicon surfaces in diluted HF solutions are both evaluated by several analytical methods.
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Investigation of Ultratrace Metallic and Organic Contaminants in Semiconductor Processing Environments

Investigation of Ultratrace Metallic and Organic Contaminants in Semiconductor Processing Environments

Date: May 1997
Creator: Xu, Fei, 1971-
Description: Detection of ultratrace levels of metallic ion impurities in hydrofluoric acid solutions and alkaline hydrogen peroxide solution was demonstrated using a silicon-based sensing electrode. The sensor's operation principle is based on direct measurements of the silicon open-circuit potential shift generated by the interaction between metallic ions and the silicon-based sensing surface. The new sensor can have practical applications in the on-line monitoring of microelectronic chemical processing. The detection of Ag+ content in KODAK waste water was carried out successfully by this novel sensor. Trace levels of organic impurities in the hydrofluoric acid solutions and in the cleanroom air were characterized by multiple internal reflection infrared spectroscopy (MIRIS) using an organics probe prepared directly from a regular silicon wafer.
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Mixed Alkyllithim/Lithium Alkoxide Aggregates with Less Sterically Crowded Alkyl Groups

Mixed Alkyllithim/Lithium Alkoxide Aggregates with Less Sterically Crowded Alkyl Groups

Date: December 1997
Creator: Thornton, Terry L. (Terry Lee), 1962-
Description: Mixed alkyllithium / lithium alkoxide aggregates in the form (RLi)n(ROLi)m were formed by addition of corresponding alcohol compounds at different Li/O ratios. Variable temperature 13C and 6Li NMR spectroscopy were used to verify the formation of the mixed aggregates and to study their behavior in hydrocarbon solution. Spectra for the lithium n-propoxide / n-propyllithium and iso-butyllithium / lithium iso-butoxide systems each indicated at least one mixed aggregate.
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Mobile Order Theory as Applied to Polycyclic Aromatic Heterocycles

Mobile Order Theory as Applied to Polycyclic Aromatic Heterocycles

Date: August 1997
Creator: Fletcher, Kristin A.
Description: Experimental mole fraction solubilities of benzil, thianthrene, trans-stilbene, thioxanthen-9-one, diphenyl sulfone and dibenzothiophene sulfone are determined in pure noncomplexing and complexing solvents. Predicted solubility values are calculated for benzil, thianthrene, trans-stilbene and thioxanthen-9-one using expressions derived from Mobile Order theory. Large deviations between experimental and predicted solubilities in alcohol solvents exist, therefore optimized solute - solvent association constants are determined. Previously measured thianthrene solubilities in five binary alkane + cyclohexane solvent mixtures are compared with values predicted from Mobile Order theory using the measured solubility in each of the pure solvents as input parameters. The experimental mole fraction solubility of benzil in eight binary alcohol + 1-octanol solvent mixtures are also measured and compared with predicted values.
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