The Stopping of Energetic Si, P and S Ions in Ni, Cu, Ge and GaAs Targets
Description:
Accurate knowledge of stopping powers is essential for these for quantitative analysis and surface characterization of thin films using ion beam analysis (IBA). These values are also of interest in radiobiology and radiotherapy, and in ion- implantation technology where shrinking feature sizes puts high demands on the accuracy of range calculations. A theory that predicts stopping powers and ranges for all projectile-target combinations is needed. The most important database used to report the …
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Date:
December 2001
Creator:
Nigam, Mohit