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Topics in micro electromechanical systems: MEMS engineering and alternative materials for MEMS fabrication.

Description: This paper deals with various topics in micro electromechanical systems (MEMS) technology beginning with microactuation, MEMS processing, and MEMS design engineering. The fabrication and testing of three separate MEMS devices are described. The first two devices are a linear stepping motor and a continuous rotary motor, respectively; and were designed for the purpose of investigating the frictional and wear properties of silicon components. The third device is a bi-stable microrelay, in which e… more
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Date: August 2004
Creator: Chapla, Kevin
Item Type: Refine your search to only Thesis or Dissertation

Effect of Silyation on Organosilcate Glass Films

Description: Photoresist stripping with oxygen plasma ashing destroys the functional groups in organosilicate glass films and induce moisture uptake, causing low-k dielectric degradation. In this study, hexamethyldisilazane (HMDS), triethylchlorosilane and tripropylchlorosilane are used to repair the damage to organosilicate glass by the O2 plasma ashing process. The optimization of the surface functionalization of the organosilicate glass by the silanes and the thermal stability of the functionalized surfa… more
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Date: August 2004
Creator: Kadam, Poonam
Item Type: Refine your search to only Thesis or Dissertation

A Wet Etch Release Method for Silicon Microelectromechanical Systems (MEMS) Using Polystyrene Microspheres for Improved Yield

Description: One of the final steps in fabricating microelectromechanical devices often involves a liquid etch release process. Capillary forces during the liquid evaporation stage after the wet etch process can pull two surfaces together resulting in adhesion of suspended microstructures to the supporting substrate. This release related adhesion can greatly reduce yields. In this report, a wet etch release method that uses polystyrene microspheres in the final rinse liquid is investigated. The polystyrene … more
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Date: May 2004
Creator: Mantiziba, Fadziso
Item Type: Refine your search to only Thesis or Dissertation
open access

Polymer Liquid Crystal (PLC) and Polypropylene Interlayers in Polypropylene and Glass Fiber Composites: Mechanical Properties

Description: In recent developments of composite materials, scientists and engineers have come up with fibers as well as matrices for composites and techniques of blending high cost components with low cost materials. Thus, one creates cost effective composite materials that are as efficient as space age components. One of the major breakthroughs in this area is the innovation of molecular composites, specifically polymeric liquid crystals (PLCs). These materials have excellent mechanical properties such as… more
Date: December 2000
Creator: Maswood, Syed
Item Type: Refine your search to only Thesis or Dissertation
open access

Deposition and Characterization of Pentacene Film.

Description: Many organic materials have been studied to be used as semiconductors, few of them being pentacene and polythiophene. Organic semiconductors have been investigated to make organic thin film transistors. Pentacene has been used in the active region of the transistors. Transistors fabricated with pentacene do not have very high mobility. But in some applications, high mobility is not needed. In such application other properties of organic transistors are used, such as, ease of production and flex… more
Date: December 2003
Creator: Singh, Nidhi
Item Type: Refine your search to only Thesis or Dissertation
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