Characterization of Methyltrimethoxysilane Sol-Gel Polymerization and the Resulting Aerogels.
Description:
Methyl-functionalized porous silica is of considerable interest as a low dielectric constant film for semiconductor devices. The structural development of these materials appears to affect their gelation behaviors and impact their mechanical properties and shrinkage during processing. 29Si solution NMR was used to follow the structural evolution of MTMS (methyltrimethoxysilane) polymerization to gelation or precipitation, and thus to better understand the species that affect these properties an…
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Date:
August 2003
Creator:
Dong, Hanjiang