Synthesis of cubic boron nitride thin films on silicon substrate using electron beam evaporation.
Description:
Cubic boron nitride (cBN) synthesis has gained lot of interest during the past decade as it offers outstanding physical and chemical properties like high hardness, high wear resistance, and chemical inertness. Despite of their excellent properties, every application of cBN is hindered by high compressive stresses and poor adhesion. The cost of equipment is also high in almost all the techniques used so far. This thesis deals with the synthesis of cubic phase of boron nitride on Si (100) wafers …
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Date:
May 2004
Creator:
Vemuri, Prasanna
Partner:
UNT Libraries