Investigation of Room Temperature Sputtering and Laser Annealing of Chalcogen Rich TMDs for Opto-Electronics
Description:
Chalcogen-rich transition-metal dichalcogenide (TMD) magnetron sputtering targets were custom manufactured via ball milling and sintering in the interest of depositing p-type chalcogen-rich films. Room temperature radio frequency (RF) magnetron sputtering produced ultra-thin amorphous precursor of WSx and MoSx (where x is between 2-3) on several different substrates. The influence of working pressure on the MoS3 content of the amorphous films was explored with X-ray photoelectron spectroscopy (…
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Date:
August 2022
Creator:
Gellerup, Branden Spencer
Partner:
UNT Libraries