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  Partner: UNT Libraries
 Department: Department of Chemistry
 Decade: 1990-1999
 Collection: UNT Theses and Dissertations
Adhesion/diffusion barrier layers for copper integration: carbon-silicon polymer films and tantalum substrates

Adhesion/diffusion barrier layers for copper integration: carbon-silicon polymer films and tantalum substrates

Date: December 1999
Creator: Chen, Li
Description: The Semiconductor Industry Association (SIA) has identified the integration of copper (Cu) with low-dielectric-constant (low-k) materials as a critical goal for future interconnect architectures. A fundamental understanding of the chemical interaction of Cu with various substrates, including diffusion barriers and adhesion promoters, is essential to achieve this goal. The objective of this research is to develop novel organic polymers as Cu/low-k interfacial layers and to investigate popular barrier candidates, such as clean and modified tantalum (Ta) substrates. Carbon-silicon (C-Si) polymeric films have been formed by electron beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors on metal substrates under ultra-high vacuum (UHV) conditions. Temperature programmed desorption (TPD) studies show that polymerization is via the vinyl groups, while Auger electron spectroscopy (AES) results show that the polymerized films have compositions similar to the precursors. Films derived from vinyltrimethyl silane (VTMS) are adherent and stable on Ta substrates until 1100 K. Diffusion of deposited Cu overlayers is not observed below 800 K, with dewetting occurred only above 400 K. Hexafluorobenzene moieties can also be incorporated into the growing film with good thermal stability. Studies on the Ta substrates demonstrate that even sub-monolayer coverages of oxygen or carbide on polycrystalline ...
Contributing Partner: UNT Libraries
An Approach Towards the Total Synthesis of Clonostachydiol

An Approach Towards the Total Synthesis of Clonostachydiol

Date: August 1995
Creator: Maiti, Tushar B. (Tushar Baran)
Description: The syntheses of the unsymmetrical 14-membered bismacrolides have been reviewed. A total synthesis of clonostachydiol, the latest to join this family, has been attempted using trimethylsilyl acetylene as the builiding block and palladium catalyzed reactions for the formation of key bonds. The alkyne groups were introduced by Stille coupling of trimethylstannylethynyltrimethylsilane with an acid chloride for one fragment and by addition of lithiotrimethylsilyl acetylene to an aldehyde for the other. Lactic acid derivatives were chosen as starting materials for both fragments, thus introducing two of the chiral centers. The remaining stereocenters were introduced using stereoselective reductions of ketones.
Contributing Partner: UNT Libraries
Explorations with polycarbocyclic cage compounds

Explorations with polycarbocyclic cage compounds

Date: August 1999
Creator: Chong, Hyun-Soon
Description: A variety of novel cage-functionalized pyridyl containing crown ethers have been prepared for use in selective alkali metal complexation studies. A highly preorganized, cage-functionalized cryptand also has been designed and has been synthesized for use as a selective Li+ complexant. The alkali metal picrate extraction profiles of these cage-functionalized crown ethers also have been studied. Novel cage-functionalized diazacrown ethers have been prepared for selective alkali metal complexation studies. Alkali metal picrate extraction experiments have been performed by using this new class of synthetic ionophores to investigate the effects of cage-annulation and the influence of N-pivot lariat sidearms upon their resulting complexation properties. Novel pyridyl containing calix[4]arene receptors were prepared. Analysis of their respective 1H NMR and 13C NMR spectra suggests that calix[4]arene moieties in the ligand occupy the cone conformation. The complexation properties of these host molecules were estimated by performing a series of alkali metal picrate extraction experiments. An optically active cage-functionalized crown ether which contains a binaphthyl moiety as the chiral unit was prepared. The ability of the resulting optically active crown ether to distinguish between enantiomers of guest ammonium ions (i.e., phenylethylamonium and phenylglycinate salts) in transport experiments was investigated. Hexacyclo[11.2.1.02,12.05,10.05,15.010,14]hexadeca-6,8-diene-4,11-dione was prepared from hexacyclo[7.4.2.01,9.03,7.04,14.06,15] pentadeca-10,12-diene-2,8-dione. Unanticipated ...
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Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface

Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface

Date: August 1995
Creator: Chien, Hsu-Yueh
Description: As the miniaturization keeps decreasing in semiconductor device fabrication, metal contamination on silicon surfaces becomes critical. An investigation of the fundamental mechanism of metal contamination process on silicon surface is therefore important. Kinetics and thermodynamics of the copper out-plating process on silicon surfaces in diluted HF solutions are both evaluated by several analytical methods.
Contributing Partner: UNT Libraries
Investigation of Ultratrace Metallic and Organic Contaminants in Semiconductor Processing Environments

Investigation of Ultratrace Metallic and Organic Contaminants in Semiconductor Processing Environments

Date: May 1997
Creator: Xu, Fei, 1971-
Description: Detection of ultratrace levels of metallic ion impurities in hydrofluoric acid solutions and alkaline hydrogen peroxide solution was demonstrated using a silicon-based sensing electrode. The sensor's operation principle is based on direct measurements of the silicon open-circuit potential shift generated by the interaction between metallic ions and the silicon-based sensing surface. The new sensor can have practical applications in the on-line monitoring of microelectronic chemical processing. The detection of Ag+ content in KODAK waste water was carried out successfully by this novel sensor. Trace levels of organic impurities in the hydrofluoric acid solutions and in the cleanroom air were characterized by multiple internal reflection infrared spectroscopy (MIRIS) using an organics probe prepared directly from a regular silicon wafer.
Contributing Partner: UNT Libraries
Mixed Alkyllithim/Lithium Alkoxide Aggregates with Less Sterically Crowded Alkyl Groups

Mixed Alkyllithim/Lithium Alkoxide Aggregates with Less Sterically Crowded Alkyl Groups

Date: December 1997
Creator: Thornton, Terry L. (Terry Lee), 1962-
Description: Mixed alkyllithium / lithium alkoxide aggregates in the form (RLi)n(ROLi)m were formed by addition of corresponding alcohol compounds at different Li/O ratios. Variable temperature 13C and 6Li NMR spectroscopy were used to verify the formation of the mixed aggregates and to study their behavior in hydrocarbon solution. Spectra for the lithium n-propoxide / n-propyllithium and iso-butyllithium / lithium iso-butoxide systems each indicated at least one mixed aggregate.
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Mobile Order Theory as Applied to Polycyclic Aromatic Heterocycles

Mobile Order Theory as Applied to Polycyclic Aromatic Heterocycles

Date: August 1997
Creator: Fletcher, Kristin A.
Description: Experimental mole fraction solubilities of benzil, thianthrene, trans-stilbene, thioxanthen-9-one, diphenyl sulfone and dibenzothiophene sulfone are determined in pure noncomplexing and complexing solvents. Predicted solubility values are calculated for benzil, thianthrene, trans-stilbene and thioxanthen-9-one using expressions derived from Mobile Order theory. Large deviations between experimental and predicted solubilities in alcohol solvents exist, therefore optimized solute - solvent association constants are determined. Previously measured thianthrene solubilities in five binary alkane + cyclohexane solvent mixtures are compared with values predicted from Mobile Order theory using the measured solubility in each of the pure solvents as input parameters. The experimental mole fraction solubility of benzil in eight binary alcohol + 1-octanol solvent mixtures are also measured and compared with predicted values.
Contributing Partner: UNT Libraries
Molecular Modeling Study of Oxidative Degradation of Polyperfluoroethers Catalyzed by Iron Fluoride Surfaces : An Extended Hückel Theory Approach

Molecular Modeling Study of Oxidative Degradation of Polyperfluoroethers Catalyzed by Iron Fluoride Surfaces : An Extended Hückel Theory Approach

Date: May 1995
Creator: Wang, Yanbin
Description: Extended Hückel methods are known to be a useful tool in understanding surface phenomena. Important quantities about atoms and chemical bonds can be obtained from this computationally simple method, although caution must be exercised in interpreting the results. Application of Extended Hückel calculations to large metal clusters reveals the role of d orbitals in solids. Basic ideas of constructing model compounds have been developed. Several model systems for surface chemisorption processes are constructed in order to understand the surface catalyzed oxidative degradation of polyperfluoroethers. The activation of oxygen molecules can be explained. The Lewis acid character of the iron fluoride surface can be predicted. Based on these results, mechanisms of the degradation processes are discussed.
Contributing Partner: UNT Libraries
New Adventures in the Chemistry of Polycarboncyclic Ring Systems

New Adventures in the Chemistry of Polycarboncyclic Ring Systems

Date: December 1997
Creator: Dong, Zhiming (Eric)
Description: I. Diels-Alder reactions of 1,2,3,4,9,9-hexachloro-1,4,4a,8a-tetrahydro-1,4-metha- nonaphthalene (16) and 1,2,3,4,9,9-hexachloro-1,4,6,7-tetrahydro-1,4-methanonaphthalene (17) toward dienophiles N-methyl-1,2,4-triazoline-3,5-dione (MTAD), N-phenyl-1,2,4-triazoline-3,5-dione (PTAD) and/or N-methylmaleimide (NMM) have been examined. II. Epoxides derived from functionalized 1,4,4a,9a-tetrahydro-9,10-dioxo-1,4-methanoanthracenes (1a and 1b) undergo acid- and base-promoted intramolecular nucleophilic ring-opening to form new polycyclic alcohols. III. The title cycloalkylidenecarbene has been generated via reaction of 8-methylenepentacyclo[5.4.0.0^{2,6}.0^{3,10}. 0^{5.9}]undecan-11-one (44) with diethyl diazomethyl-phosphonate (DAMP). This species could be trapped in situ by cyclohexene, thereby affording the corresponding cycloadduct 46a and 46b.
Contributing Partner: UNT Libraries
I. On the Mechanism of Acid Promoted Rearrangement of PCU-Derived Pinacols II. Synthesis of a Trimethyltrishomocubyl Helical Tubuland Diol

I. On the Mechanism of Acid Promoted Rearrangement of PCU-Derived Pinacols II. Synthesis of a Trimethyltrishomocubyl Helical Tubuland Diol

Date: May 1995
Creator: Liu, Zenghui
Description: I. Reductive dimerization of pentacyclo[5.4.0.0.^2,6.0^3,10.0^5'9]undecane-8-one-(PCU-8-one, 53) affords a mixture of meso and d,l pinacols (55a and 55b respectively). Acid promoted rearrangement of 55a and 55b conceivably can proceed with migration of C(7)-C(8) and/or C(8)-C(9) to form the corresponding pinacolone(s). In our hands, acid promoted rearrangement of 55a and 55b each proceeds with exclusive migration of C(7)- C(8) bond, thereby affording 58a and 59a respectively. Mechanistic features of this rearrangement are discussed. II. 4,7,1 l-trimethylpentacyclo[6.3.0.0.^2,6.0^3,l0.0^5,9]undecane-exo-4,exo-7-diol (23a) was successfully synthesized. This diol crystallizes in a helical tubuland lattice although its molecular structure does not possess C2 rotational symmetry.
Contributing Partner: UNT Libraries
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