Wettability of Silicon, Silicon Dioxide, and Organosilicate Glass
Description:
Wetting of a substance has been widely investigated since it has many applications to many different fields. Wetting principles can be applied to better select cleans for front end of line (FEOL) and back end of line (BEOL) cleaning processes. These principles can also be used to help determine processes that best repel water from a semiconductor device. It is known that the value of the dielectric constant in an insulator increases when water is absorbed. These contact angle experiments will d…
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Date:
December 2009
Creator:
Martinez, Nelson
Partner:
UNT Libraries