UNT Theses and Dissertations - 9 Matching Results

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Characterization of Post-Plasma Etch Residues and Plasma Induced Damage Evaluation on Patterned Porous Low-K Dielectrics Using MIR-IR Spectroscopy

Description: As the miniaturization of functional devices in integrated circuit (IC) continues to scale down to sub-nanometer size, the process complexity increases and makes materials characterization difficult. One of our research effort demonstrates the development and application of novel Multiple Internal Reflection Infrared Spectroscopy (MIR-IR) as a sensitive (sub-5 nm) metrology tool to provide precise chemical bonding information that can effectively guide through the development of more efficient … more
Date: May 2016
Creator: Rimal, Sirish
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Chemical and Electronic Structure of Aromatic/Carborane Composite Films by PECVD for Neutron Detection

Description: Boron carbide-aromatic composites, formed by plasma-enhanced co-deposition of carboranes and aromatic precursors, present enhanced electron-hole separation as neutron detector. This is achieved by aromatic coordination to the carborane icosahedra and results in improved neutron detection efficiency. Photoemission (XPS) and FTIR suggest that chemical bonding between B atoms in icosahedra and aromatic contents with preservation of π system during plasma process. XPS, UPS, density functional theo… more
Date: December 2016
Creator: Dong, Bin
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Direct Atomic Level Controlled Growth and Characterization of h-BN and Graphene Heterostructures on Magnetic Substrates for Spintronic Applications

Description: Epitaxial multilayer h-BN(0001) heterostructures and graphene/h-BN heterostructures have many potential applications in spintronics. The use of h-BN and graphene require atomically precise control and azimuthal alignment of the individual layers in the structure. These in turn require fabrication of devices by direct scalable methods rather than physical transfer of BN and graphene flakes, and such scalable methods are also critical for industrially compatible development of 2D devices. The … more
Date: August 2016
Creator: Beatty, John D.
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Direct Inject Mass Spectrometry for Illicit Chemistry Detection and Characterization

Description: The field of direct inject mass spectrometry includes a massive host of ambient ionization techniques that are especially useful for forensic analysts. Whether the sample is trace amounts of drugs or explosives or bulk amounts of synthetic drugs from a clandestine laboratory, the analysis of forensic evidence requires minimal sample preparation, evidence preservation, and high sensitivity. Direct inject mass spectrometry techniques can rarely provide all of these. Direct analyte-probed nanoe… more
Date: May 2016
Creator: Williams, Kristina Charlene
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Electrodeposited Metal Matrix Composites for Enhanced Corrosion Protection and Mechanical Properties

Description: In the oil and gas industry, high corrosion resistance and hardness are needed to extend the lifetime of the coatings due to exposure to high stress and salt environments. Electrodeposition has become a favorable technique in synthesizing coatings because of low cost, convenience, and the ability to work at low temperatures. Electrodeposition of metal matrix composites has become popular for enhanced corrosion resistance and hardness in the oil and gas industry because of the major problems tha… more
Date: May 2016
Creator: Thurber, Casey Ray
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Forensic Analysis of Ink on Documents Using Direct Analyte-Probed Nanoextraction Coupled Techniques

Description: Analzying questioned documents in a nondestructive nature has been an issue for the forensic science community. Using nondestructive techniques such as video spectral comparator does not give reliable information due to the variations in gray or color levels that are distinguished differently by analysts. Destructive techniques such as chromatography give dependable, qualitative and quantitative, information but involves altering the evidentiary value of these questioned documents. The paradox … more
Date: May 2016
Creator: Huynh, Vivian
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Interfacial Electrochemistry of Cu/Al Alloys for IC Packaging and Chemical Bonding Characterization of Boron Doped Hydrogenated Amorphous Silicon Films for Infrared Cameras

Description: We focused on a non-cooling room temperature microbolometer infrared imaging array device which includes a sensing layer of p-type a-Si:H component layers doped with boron. Boron incorporation and bonding configuration were investigated for a-Si:H films grown by plasma enhanced chemical deposition (PECVD) at varying substrate temperatures, hydrogen dilution of the silane precursor, and dopant to silane ratio using multiple internal reflection infrared spectroscopy (MIR-IR). This study was then … more
Date: May 2016
Creator: Ross, Nick
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Investigation of Post-Plasma Etch Fluorocarbon Residue Characterization, Removal and Plasma-Induced Low-K Damage for Advanced Interconnect Applications

Description: Modern three-dimensional integrated circuit design is rapidly evolving to more complex architecture. With continuous downscaling of devices, there is a pressing need for metrology tool development for rapid but efficient process and material characterization. In this dissertation work, application of a novel multiple internal reflection infrared spectroscopy metrology is discussed in various semiconductor fabrication process development. Firstly, chemical bonding structure of thin fluorocarbon … more
Date: May 2016
Creator: Mukherjee, Tamal
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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Lipidomic Analysis of Single Cells and Organelles Using Nanomanipulation Coupled to Mass Spectrometry

Description: The capability to characterize disease states by way of determining novel biomarkers has led to a high demand of single cell and organelle analytical methodologies due to the unexpected heterogeneity present in cells of the same type. Lipids are of particular interest in the search for biomarkers due to their active roles in cellular metabolism and energy storage. Analyzing localized lipid chemistry from individual cells and organelles is challenging however, due to low analyte volume, limited … more
Date: May 2016
Creator: Bowman, Amanda
Item Type: Refine your search to only Thesis or Dissertation
Partner: UNT Libraries
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