Charge Collection Studies on Integrated Circuit Test Structures using Heavy-Ion Microbeams and MEDICI Simulation Calculations Page: 4
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induced charge is shared and collected among charge storage cells, Multiple Bit Upsets
(MBUs) can occur. A key parameter here is the stopping power or energy loss per unit
track length, which is a measure of the deposited energy by the incoming particle in the
medium. The induced charge is due to the electronic contribution of the stopping power,
referred to as Linear Energy Transfer (LET) in units of MeV/mg/cm2. The program
SRIM, which simulates ion implantation in amorphous materials, is routinely used to
calculate the stopping power [9].
The critical volume V, is defined as the volume enclosing the ionizing particle
track, which contains just enough induced charge (or critical charge Qc) to cause a circuit
upset. Since Q, is a function of the design and operation of the IC, the above definition is
not totally appropriate in all circuit cases. For example, Q, may not be a circuit constant
but can vary with the timing of the strike relative to the dynamic operation of the circuit,
the location of the strike relative to the sensitive node, charge pulse shape, power supply
voltages etc. [10,11]. Still, Q, remains the single most useful comparative measure of the
soft error tolerance of a circuit type. Generally, the critical charge for an unhardened
device decreases with reduced feature sizes. FIGURE 2 shows SEU critical charge (Q))
versus feature size (1) for a broad range of technologies. The curve shows the / scaling
trend together with a lack of dependence on the device technology [12].
To study and model SEUs, the SEU cross section is another important parameter.
This parameter is the product of the number of upsets and the secant of the tilt angle of a
beam divided by the beam fluence. From different ion species and different energies,
induced SEU cross-sections, the sensitive depth, and therefore the sensitive volume can
be experimentally determined [13-16].
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Guo, Baonian. Charge Collection Studies on Integrated Circuit Test Structures using Heavy-Ion Microbeams and MEDICI Simulation Calculations, dissertation, May 2000; Denton, Texas. (https://digital.library.unt.edu/ark:/67531/metadc2469/m1/17/: accessed April 25, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; .