Study of Novel Ion/surface Interactions Using Soft-landing Ion Mobility Page: 32
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power is sufficient to maintain the plasma. The DC based source requires only applying
the voltage and increasing it until the steady state discharge is achieved.
RF Input Tuning
Capacitor
e /
Load
Figure 6. Schematic diagram of RF matching network used for capacitively
coupled plasma sources
Sample handling within the plasma chamber is achieved by mounting the sample on a
rod that is movable within the chamber through an Ultra-Torr fitting. This allows the
sample to be oriented spatially within the plasma cone to achieve the maximum sample
coverage and thus minimizing sample exposure time necessary.
Combining the plasma sources with the SLIM system affords the capabilities of
quickly and efficiently modifying substrates and as-deposited surfaces to understand32
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Hoffmann, William Darryle. Study of Novel Ion/surface Interactions Using Soft-landing Ion Mobility, dissertation, December 2012; Denton, Texas. (https://digital.library.unt.edu/ark:/67531/metadc177214/m1/42/: accessed April 24, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; .